port pressure: 0.7 MPa, A port pressure: 0.2 MPa, Flow: 0 l/min (ANR) VEX1A33, VEX1B33 VEX1130 3, VEX1230 3 VEX1330 3 Set point Set point Set point Set point A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) Set point Set point P port pressure (MPa) P port pressure (MPa) P port pressure (MPa) VEX1530 3 VEX1730 3 VEX1930 3 Set point Set point Set point Set point A port pressure

MLGC

H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore

MLGC

for the one without rear plate. 9-4-7 8 Series MLGC Dimensions Front mounting flange style: With rear plate MLGCF--RBP Unlocking port Unlocked when pressurized P Head side cylinder port Rear plate 2-O through P Rod side cylinder port U W A' BP Lock port for pressure lock (Plug with breathing hole for spring lock) AP AB V Y + Stroke Z + Stroke 4-AK hole For 4-AO WH (Max.)

Brake mechanism added

Applicable bore size A1 E1 D1 L1 MM R1 U1 ND NX NZ L Split pin size Flat washer size Shaft diameter: NDH10 Split pin Hole diameter: NDd9 L L MM Flat washer: Polished round D1 D1 MM Y-04D 40 22 24 10 55 M14 x 1.5 13 25 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1 NX NZ L A1 L1 U1 A1 L1 U1 Y-05D 50, 63 27 28 14 60 M18 x 1.5 15 27 12 16 +0.3 +0.1 38 55.5 3 x 18 L Polished round 12 E1

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number

VT307

= 26 (Pitch) (P port) Max. 10 Max. 10 Mounting bracket n-Rc 1/8, 1/4 (A port) P = 26 L Dimension n: Stations Stations Formula L1 = 26 x n + 24 L2 = 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

VK300

R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11

AR20-B to AR60-B

min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AR50(K

33

HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v HED Reference item HEA Electrical Wiring Warning IDH * In the case of [Mcm], it will be 0.003 to 0.01.

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

GA R 2-RcP CDH9 J H MM D E e Width across flats G l 10 f 0.1 0.4 CX NB Air release Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke S + Stroke K F L MA A RR SS + Stroke ZZ + Stroke (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB NA NB P R S T CX CD RR SS U L e f Q 32 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 52 21.5 15 25 to 1400 1/

Booster Regulator Series VBA1110 to 4200 1

2 VBAT10-Y-2 Accessorys part no.

MGC

Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

VCS

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K N.C.

Suction Guard (Produced upon receipt of order) FHG Series

block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/

Slider Type Ball Screw Drive/11-LEFS Series

100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5