Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

HRS100/150

[mg/L] 50 or less v Corrosion Scale generation Sulfuric acid ion (SO42) [mg/L] 50 or less v pH (at 25C) 6.5 to 8.2 v v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Electric conductivity (25C) [S/cm] 100* to 800* v v Total hardness [mg/L] 70 or less v Standard item Chloride ion (Cl) [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L

Table of Contents

500 Maximum speed (mm/s) 2.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series SY100 3 Port Solenoid Valve Rubber Seal

MO: Without connector L P 1 0 LN or MN option includes 2 sockets.

Auto Switch Guide

Type P. 9-15-23 Band, Rail, Tie-rod Mounting CNS CLS CLQ MLGP RLQ MLU P. 9-15-26 Solid State Switches ML1C DGeneral Purpose Type P. 9-15-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 9-15-39 Direct Mounting 2-color Indication Type P. 9-15-42 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 9-15-50 Band, Rail, Tie-rod Mounting

Multi-Axis Step Motor Controller

JXC-C2VController/JXC73/83 To I/O To ENC VActuator cable p. 17 Robotic cable Standard cable LE-CP-LE-CP---S To USB To MOT To CI To C PWR V Motor control power supply connector (Accessory) AWG20 (0.5 mm2) p. 12 V Cable with main control power supply connector Cable length: 1.5 m (Accessory) p. 15 Part no. JXC-C1 Provided by customer.

Thermo-chiller

] 50 or less Item Unit Standard value Inuence Corrosion Scale generation Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less pH (at 77F [25C]) 6.5 to 8.2 Electric conductivity (25C) [S/cm] 100 to 800 Calcium hardness (CaCO3) [mg/L] 50 or less Standard item Ionic state silica (SiO2) [mg/L] 30 or less Chloride ion (Cl) [mg/L] 200 or less Iron (Fe) [mg/L] 0.3

MLGP

CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing

MLGP

CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

Angle Seat Valve /

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The number of adjustment nut (its pitch is 1mm) rotations and initial exhaust conductance should be confirmed referring to the figure on the right. 20 Initial exhaust valve conductance l/s (viscous flow) Shows flow rate when P=0.1MPa 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 [2] Opening of the initial exhaust valve (valve S) When pressure is applied to the pilot port S, the

2 Phase Stepper Motor/Without Motor Brake Series LXP

For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 200 50 10 1 50 2.1 4.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 2.1 0.6 0.2 0.1 200 0.6 1.1 0.3 0.1 0.1 Refer to page 302 for acceleration time. 249 Series LXP CE Marking Guide Rod Type With Motor Brake/Without Motor Brake How to Order LX P B 2 S 1 S B 100 F9N Q B CE marking Guide rod type P Actuator configuration Number

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

'rll-r-1 q-___l__rL iJrql_:^-f^/rF+l -Ti-e),ri-?-'J I u c o u p n s / / p e a f l n s Con lnc I F'rolection Box Conlact Protection,,/lnternal Circuit O-R7 and D-Rg type switches have no built-in contact omtection circuit. Use this box for induction loads, 1.5 ft (0.5m) or more of lead wire, or AC 100V aoolications. 9q-q1!

NCRBIBwserbs

'rll-r-1 q-___l__rL iJrql_:^-f^/rF+l -Ti-e),ri-?-'J I u c o u p n s / / p e a f l n s Con lnc I F'rolection Box Conlact Protection,,/lnternal Circuit O-R7 and D-Rg type switches have no built-in contact omtection circuit. Use this box for induction loads, 1.5 ft (0.5m) or more of lead wire, or AC 100V aoolications. 9q-q1!

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Confirmation of allowable load weight by application Vertical downward: Press Horizontal: Chucking Vertical upward: Lifter l l m m F m F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) to 300 to 500 to 700 to 300 to 500 to 100 to 200 to 300 Graph Graph Graph Graph Graph Graph Graph Graph l: The dimension for the load center of gravity position is the dimemsion

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,