IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

ZISE10.eng

Display to show the standard product Names of individual parts 1 s Output (OUT1) display (Green) Output (OUT2) display (Red) Display to show the unit specification button (SET) 1 s Connector LED display ZSE10(F)/ISE10 Display to show the product Pin No. of the Connector button (UP) Socket Housing DC(+) Brown 5 Pin No. 1 s button (DOWN) Display to show the pressure range OUT1 Black 4 OUT2

Multistage Ejector Series ZL112/212 1

Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Multistage Ejector (N)ZL Series

Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type.

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 6 Stations, P,E Port Location: D Side, A,B Port Size: M5, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 10 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 8 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90