RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

valve S is removed from the valve S assembly and opens until the adjusted opening setting. 8 6 XMD/XYD-25 [3] Opening of the main exhaust valve (valve M) When pressure is applied to the pilot port M, the valve M is removed from the body seat surface and fully opens. 4 2 0 [4] Closing of the initial exhaust valve, the main exhaust valve By removing the pressure from the pilot ports S and

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

Series VCL

thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-21-37 for details.

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18

VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9%, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 9.46391 lb, ModelNote)Rated flow (l/min (ANR))Port sizeMass (kg)AM65060001, 1 1 24.2

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .17636 lb

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .43342 lb

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .10471 lb

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9% ?, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 9.47987 lb, ModelNote)Rated flow (l/min (ANR))Port sizeMass (kg)AM65060001, 1 1 24.2

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .25705 lb

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .13617 lb

Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.Threads: UNF, NPT , Compact and light weight , Grease-free , Applicable tube material: FEP, PFA, nylon, soft nylon, polyurethane, polyolefin , Electroless nickel plated (brass parts), FITTING, METAL, EXT MALE EL, CONNECTORS, KQB2 BRASS ONE TOUCH FITTINGS, JB, KQB2 10MM, .28660 lb

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9% ?, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 22.33503 lb, ModelNote)Rated flow (l/min (ANR))Port sizeMass (kg)AM850120001 1 2, 210.5

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9%, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 10.45526 lb

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9%, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 24.71181 lb, ModelNote)Rated flow (l/min (ANR))Port sizeMass (kg)AM850120001 1 2, 210.5

Mist separator, possible modular connection, Dust filtration, oil mist separation , Nominal filtration rating: 0.3 m , Filtration efficiency: 99.9% ?, MIST SEPARATOR, AIRLINE EQUIPMENT, AM MIST SEPARATOR, JB, AM 1 1/2INCH STANDARD (PT), 10.16719 lb, ModelNote)Rated flow (l/min (ANR))Port sizeMass (kg)AM65060001, 1 1 24.2