Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16
A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96
G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.
Wireless Remote A unit which establishes wireless communication of input or output data to a Wireless Base. Wireless unit A unit which establishes wireless communication.
H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para.
To release residual pressure, select a model with a backflow function. Using a model without a backflow function makes for inconsistent residual pressure release (i.e., residual pressure may or may not be released) depending upon the operating conditions. 3.
To release residual pressure, select a model with a backflow function. Using a model without a backflow function makes for inconsistent residual pressure release (i.e., residual pressure may or may not be released) depending upon the operating conditions. 3.
For DC : SY100 30 4A For 100 VAC : SY100 30 1A Pin Groove Cover For 200 VAC : SY100 30 2A For other voltages of AC : SY100 30 3A Pin Groove Cover DC polarity indication Lever SY100 30 A Without lead wire : with connector and 2 pcs. of sockets only -+ Socket Lead wire Connector Lead wire length How to Order Indicate part numbers of the valve without connector and the required connector assembly
L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric sizes A M1 L5 Max.
Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39
Thus, if the leakage volume is 30 /min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 /min (ANR), the S type can attain a higher vacuum pressure.
bore size D-P5DW 40, 50, 63 B + First-stage stroke =U =U Mounted on different side in case of a full stroke of 25 mm or less B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B A B A B A B A B A B A B 32 29 39.5 30 40.5 26 36.5 31.5
Pressure (Close to Open) AC50* 93 96 131 Model AV5000 AV2000 AV3000 AV4000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101 131 Proof pressure 225 psi (1.5 MPa) 60 (0.4) Operating pressure range 30 to 150 psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37 61 1(P) to 2(A) Effective area (mm2)
Be aware that the output circuit is not active immediately after the power is connected. 3.1-12 PSE100 Dimensions A: Panel mount 56 l50 Gasket (Accessory) 7.4 l48 PRESSURE SWITCH 10 8 l 45 A Panel mount adaptor (Accessory) 55 11.4 Cover for display (Optional) 62 4 X 7.5 (= 30) 6.5 7.5 10-M3 2-M3 X 8L 30 View A Cutout dimensions for panel mount 65 or more 45 +0.6 0 +0.6 0 45 +0.6 0 N pieces
(A-B)/4 A= H_1=|(A-B)/2| B= 1 28 - [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] 29 - [F11] <> [F11] , 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] 2]/[bar]/[psi]/[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34
-3. 10 15, 30, 45, 60, 75, 100, 125, 150 Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.
( ) , 8 No.SYJ300-OMU0003 SYJ Series AC200V,AC220V L,MAC DC AC200V,AC220V ,, [] [] SYJ3000,5000,7000 3 SYJ300050007000SYJ300500700 3 SYJ300-P.17 SYJ500-P.19 SYJ700-P.21 D 0.1Nm [E ] (D,E) 9 No.SYJ300-OMU0003 SYJ Series 300mm Assy DCSY100-30-4AAC100VSY100-30-1AAC200VSY100-30-2AACSY100-30-3ADC SY100-30-A 2 300mm 6 600mm 10 1000mm 3.23.7mm 15 1500mm () 20 2000mm 25 2500mm
M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02
No.RS2H-OM0045PC / RS2H (5080) P.2 1. P.4 1-1. 1-2. 1-3. 1-4. 2. P.5 3. P.8 3-1. 3-2. 3-3. 3-4. 3-5. 3-6. 3-7. 4. P.12 5. P.12 6. P.13 6-1. 6-2. 6-3. 6-3-1. 6-3-2. 6-3-3. 6-3-4. 6-4. 6-4-1. 6-4-2. 7. P.17 7-1. 7-2. 7-3. 7-3-1.D-M9/A9 7-3-2.D-P3DW 8. P.20 8-1. 8-2. 9. P.21 10.