1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

JXCx-OMT0034CN

(LEC)PLC 46 - 14./ () (50mm ) ( ) 5m 5m 10%(15m 20%) 47 - 15./ 15.1 (LE ) ,, () EMG() 1000 1 48 - /(Best Pneumatics No) UL UL1310 Class2 15.2 () () 49 - 15.3 90 100 (DC24V)SVON () a) b) c) d) e) D (100) 50 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 51 - 15.5 5 15.6 OFF 52 - 16. 16.1 / 16.2 ON 53 - 5 () 54 - 16.3 50mm 16.4 () 55 - 16.5 16.6 D(100) 16.7 56

CRB1/Size: 10, 15, 20, 30

Vane style S D Single vane Double vane Size 10 15 20 30 Rotation angle Application Symbol Rotaion angle 90 180 270 90 100 90 180 270 90 100 Single vane Double vane Flange Brackets Part No. (Refer to p.1.1-6 for further information on specifications.) Ass'y part No.

F/ISE

Reference page Item 3 Output type Example of internal circuit and wiring 4 Auto shift function, Chattering prevention function 5 Measures to be taken when error occurs 6 11 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/ISE60 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 Bracket A ZS-24-A View A Bracket D A 30 20 20 45 55 4.5 4.2 11.5 40

VXD21/22/23

Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66

3

4.5 1.5 2 x Port size S U T (35.5) 42 H OUT IN 2 x M3 x 0.5 depth 5 L K N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead

AIR CYLINDER

Troubleshooting P.23 6. Construction P.26 7. Auto switch precautions P.30 1) Applicable auto switches P.30 2) Precautions for use P.32 -1- 3A 3/5 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

AN

Model Model Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006

NCRBIBwserbs

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

PFxx-OMP0001CN

] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F Revision history A B C D E F [September 2016] 4-14-1, Sotokanda

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Auto Switch Circuit Retaining D-T791, T792, T991, T992 D-S791, 5792, 5991, 5992 iftr,:r llEekT-i-ili+:; ' 19 "fl riu* r i-fgl]_L-"",," NCDfl BlOW10.15 NCDRB1OW20.30 D-R801. R802. 90A D-R731, R732 D-90 l B u e D-93A I I !

Digital Flow Switches

Pin description 40 2-Port size 44.5 30 1 DC(+) 50 2 OUT2 3 DC() 4 OUT1 (41.5) 73 Flow direction 6 Series PF2A to are terminal numbers.

Trimmer Auto Switch

READY 8.6 12 3.5 DIN rail (35 mm width) Supplied by users. 21.1 6 30 2 x 3.5 Connector for sensor e-con 5 46 2.0 ADJ OFF SET 4 Series D-M9K/D-7K/D-RK How to Mount and Move the Auto Switch D-M9K Mounting Bracket Direct Mounting Type Solid stateD-M9K How to Mount and Move the Auto Switch Applicable Actuators Air Grippers Hexagon socket head cap screw (M2.5 x 12L) Description

JXCx-OMT0030CN

(100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (DC24V 0V ) Ry EMG+ Ry EMG(1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V LECOFF 25 - 7CN3: 1 5 4 3 2 1 2 5 4 3 2 1 9 8 7 6 9 8 7 6 3 RXDTXD-P / 4 5 DGND 6 VP

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

CYP

Proper auto switch mounting position A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 Cylinder model CYP15 93.5 24.5 CYP32 122 33 Auto Switch Mounting When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.