3

4.5 1.5 2 x Port size S U T (35.5) 42 H OUT IN 2 x M3 x 0.5 depth 5 L K N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

AC Servo Motor Driver (Pulse input type/Positioning type)

When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). 30 - 5.3.5 Electronic Gears It is necessary to adjust the electric gear to convert from the command pulses sent from position unit to the travel amount of electrical actuator.

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

Soft Start-up Valve

K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3

VXR21/22/23

terminal DIN terminal Q N 59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

Refrigerated Air Dryer

E Ventilation direction Compressed air inlet Illuminated switch Compressed air outlet J F G Evaporation thermometer Ventilation direction C Ventilation air inlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9 [125

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

VCC

VCC12(D)-00 38.80.1 230.1 Leakage detection port 16.50.1 1.2 to 2 hole 3.8 hole Pilot port IN port 4 hole 1.2 hole R0.2 30 R0.2 OUT port 210.05 M26 x 1.5 21.60.05 240.05 200.05 C1 30 30 2.5 8.5 330.1 40.80.1 450.1 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Rotary Table

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

4/5 Port Air Operated Valve Series SYJA3000

L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D

S Couplers

81.7 H KKA6S-03M-1 R 3/8 51.4 44.9 138.3 L -04M-1 1/2 R 1/2 11.4 81.6 54.4 46.4 149.6 30 30.7 -06M-1 R 3/4 56.4 46.9 174.0 Female thread type (mm) Body size H Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L D KKA3S-01F-1 Rc 1/8 44.5 37.6 T 17 -02F-1 1/8 Rc 1/4 18.5 6.1 23.4 44.8 41.2 -03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22

CU

Operating Range (mm) Bore size Switch types 25 32 20 D-A9, D-A9V D-F9, D-F9V D-F9W, D-F9WV 11 12.5 14 6.5 7 7 Values in this table include hysteresis and are to be used as a guide only. They do not guarantee an actual fixed range (expect approximately 30% dispersion).