.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

CP95

7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30

CP95

18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5

Air Cylinder RSQ Series Stopper Cylinder

> r l ii_9N c]0 v tadiris:10 Bore size d32, 040, d50/FSEOB32, 40, 50 _ 2 1 ?q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

FSQ seies

> r l ii_9N c]0 v tadiris:10 Bore size d32, 040, d50/FSEOB32, 40, 50 _ 2 1 ?q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

36.6 35 30.2 28.6 13.3 17 AS22l1F-U02-04A 4 8.2 AS22l1F-U02-06A 6 10.4 23.4 32.7 AS22l1F-U02-08A 8 13.2 23.9 33.2 14.2 18 AS22l1F-U02-10A 10 15.9 26.9 36.2 15.6 19 AS32l1F-U02-06A 6 1/4 17 13 13.3 39 AS32l1F-U02-08A 8 13.2 22.7 33 14.2 AS32l1F-U02-10A 10 15.9 26.7 37 35.7 15.6 40 AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3

CEx-OMQ0011

0.88 =0.073 M 1max 12 an 0.25 0.375 0.25 0.073 an 0.948 an1 OK ML2B32 20 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

o

:ri r:r, ':,:: r:, L Type Plug Connector (L) r' M Type Plug Connector(M) NW5J3-S46+!!

o

:ri r:r, ':,:: r:, L Type Plug Connector (L) r' M Type Plug Connector(M) NW5J3-S46+!!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

:ri r:r, ':,:: r:, L Type Plug Connector (L) r' M Type Plug Connector(M) NW5J3-S46+!!

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

NCA1

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

Series VCL

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

Single Axis Electric Actuator Serriies LJ1S Slider Guide

m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 50 L1 0 2 4 6 8 10 Transfer load m (kg) 150 L2 100 Mer m 50 L2 0 2 4 6 8 10 Mer Transfer load m (kg) m a = 500 150 a = 1000 100 a = 2000 L3 50 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 90 Standard Motor/Horizontal Mount Specification

Slide Tables MX Series

For connection with a load having an external support/guide mechanism, select an appropriate connection method and perform careful alignment.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).