MVGQ

Enclosure Dustproof Grommet (G)/(H), L plug connector (L), M Plug connector (M) RS Q G Electrical entry RS H A 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC50/60 Hz Standard Stroke RZQ 10% of the rated voltage Allowable voltage (W) (2) (%) Model Standard stroke (mm) 0.5 (With indicator light: 0.55) Power consumption DC MI W S M L MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 0.9

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Horizontal 20 Lateral load 100% 10 Lateral load 50% W 5 Horizontal empty weight deflection 2 Lateral empty weight deflection 1 Load point distance 0.5 Figure 2.

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rod boot Boi.~ :S, rz.e W " K !

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Table of Contents - Tubing

Symbol 20 100 Length 20m 100m Inner tube I.D. Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

Low Friction Cylinders Series MQ

load W(N) 5 40 4 30 30 30 3 25 25 20 2 20 20 16 10 16 1 10 10 100 75 60 30 100 75 60 30 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral load at the rod end is for the rod end female thread.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. Connection threads NPT Model L H A M W E Applicable tubing O.D.

AW

w w AW10 y y y q q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

Table of Contents

DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (7.5 mA), Holding 0.83 VA (7.5 mA) 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 3 position closed center 220 VAC Inrush 1.1 VA (5 mA),

58

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: Head flange: 0.3 433 386 476 F G L, F 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 5 Series CS2 Construction !

0.55

base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).

SZ3000

Specifications Standard/internal pilot specifications External pilot specifications 20 20 stations U side D side w How to Order Valves Enter the symbols for the required specifications in the blanks below.

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

20 MIS12-20D 10, 20, 30 mm -X 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

HRX-OM-I051

(See Appendix 8.4 Offset Function in Chapter 8 for details.) 4 OFFSET OFF, MODE1, MODE2, MODE3 HRZ-L: -20 to 45C HRZ-L2 : 10 to 45C HRZ-H: 20 to 93C HRZ-W: -20 to 93C Issues an alarm of Reservoir High Temp WRN if the circulating fluid exceeds the set temperature. 5 HIGH TEMP Issues an alarm of Return Low Flow WRN if the circulating fluid does not reach the set flow rate.