Compact Vacuum Unit Ejector/ Vacuum Pump System

Latching Operation Indicator light A-C ON (Set) Vacuum generation Orange B-C ON (Reset) Vacuum stop Green N.C. Operation Indicator light A-C ON (Set) Vacuum generation Orange OFF Vacuum stop If the supply valve is latching type, continuous energization is not necessary because it maintains the switching position with momentary energization for at least 10 msec.

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

AFF

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VS7-6

6, 8, 10 Piping SYJ F.

Common Supply Regulator

) AR24P-370AS-01 Rc / G AR24P-370AS-N01 NPT AR24P-320AS-01 Rc (14) Plug assembly Including part (13)) AR24P-320AS-N01 NPT AR24P-320AS-F01 G The numbers in the table and structural drawings are consistent with the numbers in sections [10.

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

5 Port Solenoid Valve Series SQ1000/2000

B Note 2) Note 1) Except double (latching) C Note 2) Note 1) The function symbol is D for double solenoid specifications.

ISA2

Direct operation poppet Air, Inert gas 2.0 Al HNBR 20 to 60 10 to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature

PSxx-OMG0005CN

PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

VFA3000

0.15 to 0.9 10 to 60 (No freezing.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH L-PIPING ADAPTERIS10L-20-D to IS10L-60-D 30 IS10 D Description Symbol Body size 20 30 40 50 60 Nil Rc Pipe thread type NPT G + 01 1/8 02 1/4 03 3/8 1/2 Port size 04 06 3/4 10 1 + Nil 0.1 to 0.4MPa a Set pressure range 6Note2) 0.1 to 0.6MPa + Nil 0.5 3 Semi-standard b Lead wire length Z 5 + Nil MPa c Pressure unit of the scale plate P MPa/psi dual scale Nil Right

PSxx-OMU0008CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V 10% DC(+) DC(-) 9 ( ) 10 11 -73No.PS-OMU0008CN-D No. / 5m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

44

1/2 10 14 10 14 10 14 19.4 23.8 19.4 23.8 20.9 25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10

Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)