Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

AS-FS

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

AS-FG

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

AS-X785

200 S AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03 3/8 04 1/2 * R thread type: With sealant G thread type: Without sealant Valve side Cylinder side 04 F 10 S AS4201 X785 Pilot port Thread type Seal method Nil R, Rc G G Nil Without sealant (for G) S With

Manifold Regulator ARM1000/2000 Series

Body size 1 1 station ITV 1000 2000 ARM1000-6A1-01G Port size (OUT side) 10 10 stations IC 01 8 1 Piping Accessory Thread type Symbol IN OUT A1 A2 B1 B2 ITVH Nil N Rc NPT Manifold side Body side Manifold side Body side None (With plug) Nil G Common With pressure gauge ITVX Note 3) When ordering single unit Individual Description Regulator main body ARM2000 ARM2000A 1362213623ARM1000 ARM1000A

SMC AXT625-10A-1 manifold block assy, VF(S)100 SOL VALVE 3-PORT*** $23.90 Add to Quote Add To Cart Add to Cart SMC AXT625-10A-1-B manifold block, VF(S)100 SOL VALVE 3-PORT**

AS

Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)

SMC AXT625-10A-1 manifold block assy, VF(S)100 SOL VALVE 3-PORT*** $23.90 Add to Quote Add To Cart Add to Cart SMC AXT625-10A-1-B manifold block, VF(S)100 SOL VALVE 3-PORT**

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 2) Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface. Maintenance and inspection will be facilitated. 3) Air is normally released from the bleed hole.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

SMC SY100-30-2A-30 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $5.26 Add to Quote Add To Cart Add to Cart SMC SY100-30-2A-50 connector ass'y, 3

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

, 3 position and 4 position dual 3 port valves.

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

HRX-OM-X010

Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 HRZ Series TOC-1 HRX-OM-X010 Table of Contents 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

HRX-OM-I051

Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing (1) . 3-6 3.3.3 Procedure for system securing

Plug-in Unit

3 (R2) 2.0 VQC2401 3.2 0.28 0.49 0.30 0.80 Rubber seal 34 or less 44 or less 3 position closed center 2.4 VQC2500 2.0 0.17 0.57 0.18 0.46 Metal seal 29 or less 38 or less Pressure center (A) 4 (B) 2 3.2 VQC2501 2.2 0.28 0.80 0.31 0.60 Rubber seal 34 or less 44 or less Dual 3 port valve Rubber seal VQC2 01 34 or less 44 or less A B C 1.8 1.8 0.28 0.46 0.28 0.46 1 (P) 5 (R1) 3 (R2) 6.2 VQC4100