Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of auto switches Shaft type S W Single shaft Double shaft 2 pcs. 1 pc. n pcs. Nil S n Refer to pages 254 and 255 for the shaft type variations.

Air Filter

64.3 AF60-D 242.6 240.9 236.5 241 256.5 261 90 64.3 -30- Revision history 40-06,50,60 size added, Corrected.

21

CM-B020 20 25 32 40 91 8 32 26 66 82 CM3U, CM3T (Rod trunnion, Head trunnion) 95 CM-B032 9 40 29 74 90 101 87 CM-B040 114.5 10 53 36.5 103 Note 1) A pivoting bracket pin and retaining rings are not included with the pivoting bracket. Note 2) The above dimensions are for the male rod end type.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

12 160 52 28 75 50 320.2 0.6 12 15 12 170 60 32 80 63 400.2 0.6 16 20 16 190 70 40 90 80 500.2 0.6 16 20 16 210 90 50 110 100 600.2 0.6 20 25 20 230 110 60 140 XD + Stroke L MR EW Single clevis (C) EB UB CB Double clevis (D) 136 CP96 Series Accessories Dimensions: Mounting Brackets Axial foot (L) [mm] TG Bore size [mm] Part no.

SY

Lead wire length (L) 300mm Nil Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the desired direction (4 directions at 90 intervals).

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

MGP

As a rule, turn the screw an additional 90 after tightening resistance is felt. FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

IIIIIIIIII

For factory pre-set models, specify set-point, input pressure, and flow, if not dead-ended. . 0.5-3.5 0.5-10 0.5-30 0.5-60 0.5-90 Back to Top .

VCC

VCKL 90 swivel elbow RETURN port Leakage detection port Special Tools Disassembly and maintenance are possible. Product design takes maintenance performance into consideration.

Metal Seal/Rubber Seal Series VQ Body Ported

While down, turn clockwise 90 to lock it. Bore 3.2 Double (Latching solenoid) Type Caution Different from the conventional double solenoid, the double uses a latching (self-holding system) solenoid.

Silencer Series AN

Performance Weight g Effective area mm2 Sonic conductance C [dm3/(sbar)] Recommended flow m3/min(ANR) Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 5 1 0.4 or less 0.5 10 2 0.8 or less 1 15 3 1.0 or less 2.5 35 7 3.0 or less 4 60 12 5.0 or less 5.5 90 18 8.0 or less 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

KV2

Series KV2 How to Order KV2 L 07 35 S Series Sealant Body Style With Sealant (as applicable) S Male Connector Straight Union Cartridge Straight H Thread Size 1/16 NPT 33 Male 45 Elbow Cartridge 45 Elbow K 1/8 NPT 34 Male 90 Elbow Plug-In 90 Elbow Union 90 Elbow Cartridge 90 Elbow 1/4 NPT 35 L 3/8 NPT 36 1/2 NPT 37 3/4 NPT 38 Male Branch Tee Union Tee T Union 00 Male Branch Y Union Y Plug-In

Modular Type Regulators Series AR

3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.

2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

VM

mounting hole 90 T.T. Key selector (2 position) VM120-01-36 VM130-01-36 Panel mounting hole JIS Symbol 2 port 3 port R port (3 port only) 0.5 MPa supply 15 N F.O.F. 2-4.6 Key can be removed at the on and off positions. mounting hole 90 T.T.

Digital Flow Switch (Integrated display type)

I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%

Mechanically Jointed Rodless Cylinders

The guideline is a 90 rotation after the fastening is felt. Switch spacer (BMY3-016) Switch mounting screw (Accessory for switch) (M2.5 x 4 l) Flat head watchmakers screw driver (Not included) Switch Spacer (mm) Applicable bore size (mm) Switch spacer 16 20 25 32 40 50 63 BMY3-016 Besides the models listed in How to Order, the following auto switches are applicable.

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10,

Cylinder with Lock Series CLS

As a rule it can be turned about 90 past the point at which tightening can be felt. 16 Series CLS/CDLS Auto Switch Internal Circuits Reed Switch Internal Circuits Lead wire colors inside [ ] are the old colors prior to conformity with IEC standards.

Stainless Steel One-touch Fittings Series KG

P. 123 P. 125 P. 127 Different dia. straight Male delta Male run tee KGY Use to branch line in the same direction from female thread and in 90 direction. Use to branch piping in 90 direction from female thread. KGH Use to connect different size tubes. KGD P. 123 P. 127 P. 127 Different dia. double union Y Branch male elbow Delta Use to branch connection of tubes in triple 90 direction.