Compact Cylinder

Hs B A Reed switch Solid state switch D-A9 V D-M9 V D-F9 WV 20, 25 Hs B A 32, 40, 50, 63 Figures in the table below are used as a reference when mounting the auto switches for stroke end detection. In the case of actually setting the auto switches, adjust them after confirming their operation.

Vacuum Pad

K: Non-rotating D-D B B Width across flats 19 Width across flats 19 D D D D 22 28 A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.

MU

Fig. (6): MU63 Allowable Load for Rod End 7-8-2 3 Plate Cylinder Double Acting, Single Rod Series MU 25, 32, 40, 50, 63 How to Order CUJ Without auto switch MU CU B 25 30 D M CQS MDU B 25 30 D M J79W S With auto switch CQM CQ2 Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Thermo-con/Rack Mount Type

With feet and no rack mounting brackets With flow switch High-pressure pump mounted HECR 008-A 800 W 1.4 kW Tap water 0.01 to 0.03C Ethylene glycol 20% 010-A 1 kW 2 kW Single-phase 200 to 240 VAC (50/60 Hz) (UL Standards) Water-cooled Single-phase 100 to 240 VAC (50/60 Hz) New New HECR 008-W 800 W 1.4 kW Peltiertype watercooled 012-W 1.2 kW 2 kW Single-phase 200 to 240 VAC (50/

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

RSH/RS1H

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

VP4

Series 50-VFE Series 50-VPE 3-6-13

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

Cylinder with Lock Series CNS

C VA BN AL A K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23 25 30 M14 x 1.5 15 31 25 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 15

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 1.27 mm Min. bending radius (Fixed) 59 mm Type 1 Type 2 Type 3 Type 1 Type 2 Straight connector type Angle connector type 36.3 L 50 14.8 50 L 44.5 22.5 22.5 2 1 5 2 1 5 28 Marker tag Marker tag 5.9 4 3 4 3 5.9 Marker tag Marker tag M12 SPEEDCON Socket connector pin arrangement B-coded (Reverse key) Socket connector pin arrangement M12 SPEEDCON 14.8 B-coded (Reverse key

VCL

A A 2 x P Port size 2 x P B 2 x M Thread depth N Port size 2 x M Thread depth N L L K K Conduit terminal:T F (Q) 34 25 U R C G1/2 E B A H D (S) Port size 2 x P 2 x M Thread depth N L K (mm) Electrical entry P Port size 1/8 H K L A B C D E F M N Grommet: G Conduit: C Conduit terminal: T Model Q R Q R Q R S U 13.5 28 64 12.5 31 6.5 M4 27 14 12.8 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5

Cylinder with Lock Series CLS

59 D 30 W 14 AL 5 N N A K 43 C B S + Stroke BY H M ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM A AL B BA BB BC BY BZ C D GA GB GC J 15 31 27 M30 x 1.5 50 47 145 75 18 110 136 115 36 16 107 58 M14 x 1.5 to 1000 15 31 27 M30 x 1.5 50 47 161 78 18 2 110 146 128 36 16 114 64 M14 x 1.5 to 1000 17 36 30.5 M36 x 1.5 56

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-30R 76 73 B MHR2-30E port position 3-M5 X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Looked by double solenoid valve) (Looked by double solenoid valve) SOL. location B (*) B (*) B B A B A B A B A B A A A A B A B A SOL. location VQC 3 position 3 position Double Double Double Double SI unit Single Single SI unit Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 The places of asterisk are not used.