VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

Rotary Table

The end angular speed is obtained by: t Table 9 Allowable kinetic energy (J) Size Allowable kinetic energy : Rotation angle [ rad ] : Rotation time [ s ] 1 0.001 Kinetic energy E is obtained by: 2 0.0015 3 0.002 7 0.006 E Therefore, the rotary table rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During uniform acceleration, the

AME

1/4, 3/8 1/2 3/8, 1/2 3/4 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AME150 AME250 AME350 AME150SAME, #1 AME350SAME, #3 AME250SAME, #2 4.6-25 Super Mist Separator Series AME Dimensions: AME450 to AME850 HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

MGC

37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting stroke Bracket mounting stroke Stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88 14 119 125st or

LEC-T1_C

L E C T 1 3 J G S 1 S 1 2 J 2 E 2 3m 1 6.43 2 6.3 9 TB 12 - 3. 3.1 (1) TB Ver.5.11 TB Ver2.1LECPA No.0 1 LECPA TB Ver2.1LECPA No. 1 ) TB Ver1.** TB Ver2.**/ / (2)Tree TB Ver.5.11 MENU Data No. 2 Data Monitor JOG Test Alarm Setting Ver1.** Ver2.** 12 TB Ver2.1*LECPANo.0 Monitor No. 2 JOG Test 1 LECPATB Ver2.1*LECPA Alarm Setting Ver1.

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

CRBB-OM00004

Various units 19 5.1 Switch block unit 20 5.2 Vertical auto switch unit 20 Part number for Auto switch unit 22 How to mount Auto switch unit 22 5.3 Angle adjustment unit 22 Part number for Angle adjustment unit 25 Mounting of angle adjustment unit 25 5.4 Joint unit for combining switch unit and angle adjusting unit 27 6.

AC Servo Motor Driver (MECHATROLINK-II type)

Bit 3 of SW2 SW1 Station Address Bit 3 of SW2 SW1 Station Address OFF 0 Disabled ON 0 50H OFF 1 41H ON 1 51H OFF 2 42H ON 2 52H OFF 3 43H ON 3 53H OFF 4 44H ON 4 54H OFF 5 45H ON 5 55H OFF 6 46H ON 6 56H OFF 7 47H ON 7 57H OFF 8 48H ON 8 58H OFF 9 49H ON 9 59H OFF A 4AH ON A 5AH OFF B 4BH ON B 5BH OFF C 4CH ON C 5CH OFF D 4DH ON D 5DH OFF E 4EH ON E 5EH OFF F 4FH ON F 5FH Turn the power

KR

Effective area (mm2) 1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats 7 M5 x 0.8 2-M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Weight: 4.5 g Effective area: 2.4 mm2 Weight: 4.5 g 15-3-27 4 Series MS Bushing

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

EXH system Common SUP system Common, Individual Vacuum Ejector Specifications Fluid Air 0.7 MPa 84 kPa 0.2 to 0.55 MPa 0.25 to 0.55 MPa 5 to 60 C 5 to 50 C Main valve Pilot valve Poppet VJ114, VJ324M Maximum operating pressure Maximum vacuum pressure Without valve With valve Without valve With valve Supply pressure range Operating temperature range Maximum air suction volume increased

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

VXA31/32

9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

LMU100/200 Series Mist Spray Unit

0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5

Stainless Steel One-touch Fittings Series KG

C MS-5AU-3 MS-5AU-4 4.5 5 11.5 12 1.7 2.1 1.4 1.5 1.6 1.8 MS-5AU-6 7 2.5 14 4.0 1.7 Barb elbow for soft nylon: MS-5ALHU-3, -4, -6 Effective orifice(mm 2) Weight (g) MS-5ALHU-3, -4 D L Part No. C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No.

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2