ASD

3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

AC Servo Motor Driver (SSCNET Type)

D 3 Set the test operation select switch to the Up Position, when performing the test operation mode by using set up software (MR ConfiguratorTM) E 2 F 1 0 (Note) This table indicates the status when the switch is set to "Down".

Air preparation filter

E) Remove the used element and O-ring from the bowl. In this operation, remove the support ring to make the replacement easier. D) E) Point O-ring for bowl Support ring Rotate approxim ately 10. Replacement should be performed while the bowl is held upright as the O-ring easily falls off. -18- Doc. no. AMX-OMU0058-C F) Remove the internal assembly which is mounted in the bowl.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

AIR CYLINDER

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

Magnet: D (Built-in), Mounting: B (Standard), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: TN (NPT), Stroke: 150mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: L (3m Lead Wire), Number: 2 pcs.

Magnet: D (Built-in), Mounting: G (Rear Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 1000mm, Option: R (Front Cushion), Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: Rc, Stroke: 150mm, Option: K (Heat Resistant Tarpaulin Rod Boot & Cushion at Both Ends), Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 300mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: Built-in, Mounting: Standard, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: NPT, Stroke: 150mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: 3m Lead Wire, Number: 2 pcs.

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: Rc, Stroke: 150mm, Option: Heat Resistant Tarpaulin Rod Boot & Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: Rc, Stroke: 300mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: Built-in, Mounting: Double Clevis, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: G, Stroke: 300mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen.

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: Rc, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen.

LFE-OMZ0012

E Electric conductivity This means "full span" or "full scale", and indicates maximum variation width at rated value. For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2) 3000 l/min (ANR) EVS7-10 (Size 3) 5500 l/min (ANR) VFN Cylinder driving size Flow rate 100 160 200 Rubber seal, single type Lightweight Size 1 (3 position): 0.55 kg Size

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

, 220VAC Grommet L type plug connector M type plug connector R Port P, E Port R Port P, E Port G : 300mm lead wire L : 300mm lead wire LZ: Lead wire w/ light & surge suppression M : With lead wire (Length: 300mm) H : 600mm lead wire LO : Without MZ: Lead wire w/light & surge suppression LOZ: W/out lead wire with light & surge suppression LO U : W/out lead wire with light & surge suppression

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B C Nil None With SUP blocking plate With EXH blocking plate With SUP and EXH blocking plates Port plug A Port plug B 1 2 3 Note) P R PR A B Cylinder port size 4 Note) 5 Note) E Note) The 3 position type uses two stations.