5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Sl modula must be orderd separately 17 17 stations Includes 1 staHon to mount Sl unit Port size Symbol P, EA, EB A,B Porting 01T 1!sNPTF Port specifications Symbol Symbol P EA,EB specifications V. NPTF 02T V. NPTF (A,B) 1 Common Common "'2 Side Bottom Bottom porting.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

PF-OMN0011_C

-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Air Slide Table/Long Stroke Type Series MXY

, D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Auto switch operating range A B A B A B 54 MXY6 34 MXH 59 5 MXY8 39 MXU 67 MXY12 47 MXS Solid State Auto Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside MXQ (mm) B B Model Mounting Auto switch operating range MXF A B A B A B 50 MXY6 3 38 MXW 55 MXY8 3.5 43 MXJ 63 MXY12 3 51 MXP Lead wire entries parallel 2

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Thermo-chiller

) 22.9 [583] 13 Series HRS100/150 Thermo-chiller Standard Type Dimensions inch [mm] HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Anchor bolt xing position B HRS100/150-A-20 (Air-cooled 200 V type) HRS100/150-A-40 (Air-cooled 400 V type) Anchor bolt xing position A (27.0 [687]) (Thermo-chiller dimension) (37.5 [954]) (Thermo-chiller dimension) 0.16 x

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

Air Slide Table

12 V 12 V Reed auto switch Solid state auto switch Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V IC circuit Relay, PLC Grommet A93V A90V A93 A90 IC circuit 100 V 2-wire 24 V 12 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

CNG

Connector Grommet Diagnostic indication (2-color indication) 12 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (PNP) 3-wire (NPN) IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

VS7-6

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

AW

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.