Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

CYV

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

KA

23.5 1 4 10 KAL06-U02 11.4 11.4 15 24.5 23 17 12 1 8 1 4 22.5 24.5 25.5 26 KAL08-U01 KAL08-U02 11 16 14 15.2 12 8 23 18.5 14.9 14.9 3 8 25.5 27 KAL08-U03 17 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 Kl 1 4 3 8 30 30.5 17 KAL10-U02 KAL10-U03 26.5 17 18.5 10 21 25.0 25.0 Ml 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 27 28 31.5 32.5 KAL12-U02 KAL12-U03 17 Hl

TK

Kl Ml Hl Dl MS Tl Note) Never cut metals such as electric wires. Part No. TK-2 Nylon, soft nylon, polyurethane, and other soft plastic tube Tube material Tube O.D. Weight 18mm or less 140g 2.5-3 Accessories/Tools Tube Cutter Series TK Tube Cutter: TK-3 (Useful type) Safety lock contained. Note) Never cut metals such as electric wires. Part No.

MGP

RN RL HN HL RN RL 0.05 0.36 0.07 0.05 0.06 0.40 0.35 0.39 20 63 0.06 0.90 0.07 0.05 0.07 0.97 1.03 1.10 25 80 0.09 1.52 0.10 0.09 0.10 1.60 1.60 1.68 32 100 0.15 0.18 0.14 0.18 40 Calculation (example) MGPM50-100-HN Basic weight + Lock unit additional weight 5.74 + 0.24 = 5.99kg 0.24 0.27 0.23 0.27 50 Allowable Rotational Torque of Plate Non-rotating Accuracy of Plate Torque: T (Nm) +

CYP

HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD

CYPSeries

1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL

CYPSeries

1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Shock Absorbers and Rate Controls

(E(l 0plindl lSoxllm/horr (hl [[r. Shorl torce (t{} lloninul (oil Spring tore (tDl Illor. Propellinq Iorie (NI 0plindl Yelo.ity Rdnqe (n/s;.) Eore J|le (nrn) ts) Sirol (nn) ttlodel W.iqhl ll!-l klerded (Nl (rn?

MGP

RN RL HN HL RN RL 0.05 0.36 0.07 0.05 0.06 0.40 0.35 0.39 20 63 0.06 0.90 0.07 0.05 0.07 0.97 1.03 1.10 25 80 0.09 1.52 0.10 0.09 0.10 1.60 1.60 1.68 32 100 0.15 0.18 0.14 0.18 40 Calculation (example) MGPM50-100-HN Basic weight + Lock unit additional weight 5.74 + 0.24 = 5.99kg 0.24 0.27 0.23 0.27 50 Allowable Rotational Torque of Plate Non-rotating Accuracy of Plate Torque: T (Nm) +

AZ1000

AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200

C95Series

1200 1 ,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 10 in 0.14 0.04 0.10 1600 1400 1200 1000 800 600 400 200 0 Clamping force (lbf) 0.7MPa 0.5 MPa 0.3 MPa 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 187 Model Selection 2 Slim-line power clamp cylinder mounting When using a hard stop Arm length L (Distance to a hard stop) Clamp arm Cylinder Shim q Upper hard stop Clamping block Clamp arm Unclamping

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

126 32 90 110 105 126 4 CKZT -X2797 -X2798 Dimensions: Clamp Arm CKZT25-A000 S-X2797 C R L L: Left 26 18 52 40 16 C: Center R: Right 200.1 2 x 4H7 through 200.02 (8) 28 2 x 6.5 through 93 44 10 200.1 5 CKZT -X2797 -X2798 Model Selection Relation between arm length and clamping force Arm length Clamp arm Shim Clamping block Extension arm Fulcrum Load cell Bore Size: 25 Bore Size:32 270 [1200

CP95

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Intermediate strokes are available.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CQ2

88 101 114 127 140 152 165 178 75 IN 45 75 106 16 25 86 115 129 144 158 173 187 202 216 100 OUT 60 101 141 32 131 173 193 214 235 256 277 297 318 471 576 152 IN 71 118 165 20 40 206 252 275 298 321 344 367 390 413 597 717 229 OUT 94 157 220 1139 50 405 441 477 514 550 586 622 659 951 369 IN 113 189 264 25 1213 1424 63 579 620 661 702 742 783 824 865 538 OUT 147 245 344 1064 1132 1200