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Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Locking Slotted Style), Port Specification: Side Ported, Port Size: 06 (3/4)

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Pilot: Internal Pilot, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Locking Slotted Style, Port Specification: Side Ported, Port Size: 3/4, Thread: -

Function: 1 (2 Position Single), Body Option: 1 (Base Mounted Non Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 06 (Sub-plate Plug-in Terminal 3/4, Non Plug-in

Function: 2 Position Single, Body Option: Base Mounted Non Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: Locking Slotted Style, Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: Sub-plate Plug-in Terminal 3/4, Non Plug-in Standard 3/4, Thread: -

7

set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) CKQ D-M9ANote 2) BMA3-040S (A set of a, b, c, e) BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT) c Switch holder b Auto switch mounting screw a * Band (a) is mounted so that the projected part is on the internal side

CC

"Jumping" is a condition in which the cylinder operates without control at a speed that is higher than the control speed.

PF-OMN0009_C

[ % ] ( ) -32No.PF-OMN0009CN-F () PF3W504 PF3W520 [ M P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa

AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

AMPSeries

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Process Valve

Skip valve function Combination of 2 or more valves of VNA series provides a skip valve function. Connect the skip valve to the A port side of a stop valve.

Exhaust Cleaner for Clean Rooms AMP Series

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Siiiil"Tivrc

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

AS

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Ambient Dryer Series AMG

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

AR425 to 935

Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a pipe tape for sealing. Recommended torque: 12 to 14 Nm.

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Clamp Cylinder with Lock Series CLK1

17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Compact Manometer Series PPA 1

For a vacuum application, use VHK2 (2 way valve).