CYV

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

NCY2 series

NqD)y2sIE-Ix'u' IIHcvaall_I xars High spsed driye wilh a pislon speed of 1500mm/s (basic type) is possible. (When without load) **I-I-xBi3 Specifications Basic type, Slider type Basic type NCY2B6-40 Basic 2 60 in/s {50 lsooommis) Not 1)Whn operaling thlscylindffat high sp6d, b.6ur to provi(b a shock absoftor.

VQC

S Kit can be used by connecting to gateway unit.

AZ1000

Vespel is a registered trademark of DuPont. 33 Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm) Series AZ1500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AZ15 S FV4 FV4 02 2PW Delivery pressure Bonnet option

Serial Network

-963-7099 Fax: 02-501-2937 Chile Phone: 02-270-8600 Fax: 02-270-8601 United Kingdom Phone: 01908 563888 Fax: 01908 561185 Italy Phone/Fax: 02-9271365 Rochester Phone: (716) 321-1300 Fax: (716) 321-1865 Dallas Phone: (972) 446-9554 Fax: (972) 446-5931 Oceania Australia Phone: 02-9354-8222 Fax: 02-9894-5719 Netherlands Phone: 020-5318 Fax: 020-5318880 Mexico Phone: 47-22-55-00 Fax: 47-22-59

AS-FG/ASD-FG

) 1/4 28.2 46.5 34.4 11 29.4 15.2 18.5 ASD430FG-02-08S 10 31 19.7 49.3 18.5 21 ASD430FG-02-10S 6 25.2 48.3 12.8 17 ASD530FG-02-06S 20.3 28.2 8 51.3 15.2 18.5 ASD530FG-02-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 1/4 42.8 15.4 37.8 32.6 10 54.1 18.5 21 ASD530FG-02-10S 23.1 34.4 12 55.9 20.9 22 ASD530FG-02-12S 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23

Profile Design ISO/VDMA Air Cylinder Series CP95

when a 63 air cylinder is operated at a maximum drive speed of 500mm/s.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

Compact

12 1.2 0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34

Currently available in metric to suit tube sizes from 3.2mm to 10 mm OD, and thread sizes from M5 to + R(PT)Speed controller with one-touch fittings, Body sizes: M5, 1/8, A1/4, Cylinder direct connected elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, SPEED CONTROL, LOW SPEED, AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), .15315 lb

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Tamper Proof and Flat Head Screw

ASD430F-02-08ST R 1/4 36.7 11 7 15 18.5 18.5 17 46.5 15.2 8 28.2 1.5 40.7 41.7 ASD430F-02-10ST 19.7 21 49.3 18.5 10 31 ASD530F-02-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-02-08ST 18.5 15.2 51.3 8 28.2 R 1/4 49.3 15.4 9.5 23 19.8 19 55.3 1.5 53.7 ASD530F-02-10ST 21 18.5 54.1 10 32.6 23.1 ASD530F-02-12ST 22 20.9 55.9 12 34.4 ASD530F-03-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-03-08ST 18.5 15.2 51.3

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.) With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

F

E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.