/

the 5-pin type, only DC voltage is available.

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

reduces flow setting time

2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

1

n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the calculation.

ZL3-OM00601

class is 2:6:3 of ISO08573-1:2010JIS B8392-1:2012.

Compact

an auto switch into the groove from the top*3 15 15 30 30 (3) Tube top mounting 5 10*2 5 10*2 *1 For 5 and 10 mm strokes, lead wires will interfere with mounting surface. *2 For 5 mm stroke, it is possible to mount an auto switch, but 2-color display may not be available. *3 When mounting an auto switch from the top with 5 or 10 mm strokes, use a D-F8 auto switch. (1) Bottom mounting

Air Combination

The compressed air quality class on the inlet side is [7:4:4]. -14- 3-5.

mlu

BBA2: D-A7/A8/F7/J7 The above stainless steel screw kit is used for auto switch D-F7BAL and D-F7BAVL when it is shipped mounted on a cylinder. Also, BBA2 is included when a auto switch alone is shipped. 3 Plate Cylinder with Lock Series MLU Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator to confirm opening and closing of valve is standard equipment. Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

Silencer Series AN

5 to 60C (2) Note 1) It indicates the inlet pressure for solenoid valve.

Electric Slide Table / High Precision Type 《 AC servo motor 》

If it is combined with a different set of parameters, failure can result. 2.

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

MVGQ

Y7BW 3-wire (NPN) 2-wire Relay, PLC RB 5 V, 12 V IC circuit 3-wire (PNP) J 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon receipt of order.

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

Sensor Monitor

Rated pressure range Current read value For example, when the display value is 1.000[MPa], 5%R.D. is 5% of 1.000 [MPa], which becomes 0.05 [MPa]. When the display value is 0.800 [MPa], 5%R.D. is 5% of 0.800 [MPa], which becomes 0.04 [MPa]. R.D. Repeatability Variation in repeated measurement of pressure display or ON-OFF output point when the pressure changes at 25 centigrade.

CLK1

Power supply voltage Internal voltage drop Leakage current Load impedance Load voltage at OFF = x 2 pcs. x Load voltage at ON = x 2 pcs. = 24V 4V x 2 pcs. = 16V = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k Leakage current from switch is 1mA Example: Power supply is 24VDC Internal voltage drop in switch is 4V 19 Magnet Field Resistant 2 Color Indication Auto Switches Rail Mount

Compact Type Dual-Rod Cylinder Series CXSJ

8 @2 @6 !4 !2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

2 Phase Stepper Motor/Without Motor Brake Series LXS

stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.