0.5

surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: Standard, Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 1/8, Option: Standard, Attachment: 3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V, Semi-Standard 1: Bowl Guard, Semi-Standard 2: Standard

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

ZQ

5 a 5 5 Component Parts No.

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

AFF

B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AFF75B 1 2 13 42 348 220 57.5 220 10 AFF75A to AFF220A/Dimensions 3-20 holes For anchor bolt mounting Label Drain Rc ORIENTATION G 184 184 236 12B AFF220A 4BJIS10k flange 500 1291 1070 670 325 282 Model A 8B B 380 380 450 C 1125 1125 1178 D 935 935 980 E 505 505 540 F 265 265 265 Port size AFF75A AFF125A

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

JXCx-OMT0032CN

a) RJ45 (8P) LEC-CG1LEC-CG1a) RJ45 (8P) a) RJ45 (8P) No 1 LEC-CG1CN1(LEC)C K 0.3m N4 L 0.5m 1 1m 2 LEC-CGD (LEC) 3 LEC-CG2(1m) 4 XS2C-D4 [] 120 1/4W 5 RJ45 CN1CN2RJ45 LEC-CAP-X22 24 - No a) RJ45 (8P) TM21P-88P b) M12 4pin HR24-8DJ4PE550A(73) XS2G-D4 [] c) M12 4pin HR24-8DP4S300(73) XS2C-D4 [] 25 - 8.2 CN1 CN1(LEC) (120 1/4W) 0V CN1 No.

LFE-OMY0008

(ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4. [F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box. 1) For an auto switch without a contact protection circuit, use a contact protection box when the wire length is 50m or longer.

CRBB-OM00004

1 2 Holding block (A) 1 2 1 Switch block (A) 1 1 Switch block (B) 1 1 Holding block (A) 1 No.

Digital Flow Switch

5 V Current output*1 4 mA 4.16 mA 20 mA B D 0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function

AMH

Select the point of contact A of inlet pressure and max. air capacity in the graph. 2. AMH650 is obtained when the max. flow line is aboveabove the point of intersection A in the graph. Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point.

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide