4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

same as the grommet type. [ ] for AC L type plug connector (L) : SYJ3120L -M3 M type plug connector (M) : SYJ3120M -M3 50.7 33.5 33.5 13.2 7.1 13.2 7.1 8.2 B A 8.2 A B 4 4 21.8 (Mounting holes for manifold) 11.5 7 (Lead wire length) 11.5 7 21.8 (Mounting holes for manifold) 39.1 [45.6] About 300 About 300 (Lead wire length) 28 [34.5] 28 [34.5] 20 13.5 15 20 15.6 13.5 15 9 9 49.5 49.5 54.7 [56

5 Port Solenoid Valve, Series VQC

KG RKT5-56 Input connector: M12, 5 pins (receptacle) Cable side connector example: OMRON Corporation XS2G 2-input block (EX250-IE1) 4-input block (EX250-IE2) Function Description No. Function Description No. Drain/Shield Drain 1 (+) Sensor power supply SW+ 1 3 1 2 2 (+) Circuit power supply V+ 2 5 2 Open N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38 45 56 6 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control

Multistage Ejector Series ZL

Mounting hole 7 With vacuum adapter ZL112-GN P V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure

30

(mm) a b Note 2) Effective area (mm2) Applicable tube b Q Weight (g) Note 1) D2 Note 1) D1 D1 L1 L2 L3 M1 M2 N O Model 3.2 4 6 8 10 12 4 6 8 10 12 16 KQB2T23-04 KQB2T04-06 KQB2T06-08 KQB2T08-10 KQB2T10-12 KQB2T12-16 3.8 7.1 16.4 36 56 108.5 8.5 11 20 29.8 41.3 58 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 4.1 4.4 6.4 7.1 8.1 9.1 9.1 11.4 13.7 16.6 18.7 24.6 8.3 9.1 11.4 13.7 16.6 18.7 14.2 15.6

mlu

19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 5 Plate Cylinder with Lock Series MLU Dimensions Axial foot type LY (mm) LH LS LH ZZ LY 11 12 15 18 LD LX 3.2 4.5 4.5 5 LZ X 6 8 10 11 Y LT 114 132 140 166.5 Model LT 56

Digital Pressure Switch

Units selection function 31 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 5 FUNC terminal setting 40 F 6 Fine adjustment of display value 42 F10 Sub display setting 43 F11 Display resolution setting 49 F80 Power saving mode 50 F81 Security code 51 F82 Input of line name 53 F90 Setting of all functions 54 F96 Input signal check 56

HRX-OM-T002

Pressure unit is MPa : Setting unit is 0.01MPa Pressure unit is PSI : Setting unit is 1PSI to PSI to 5.19 Alarm customizing function HRS090 Series 5-56 HRX-OMT002 Chapter 5 Display and setting of various functions Setting/Checking: Operation setting when "Communication error" alarm is generated 20. Press the [SEL] key once.

Servo Motor Controller (24 VDC)

Electric actuators/Common precautions .54 14.1 Design and selection.54 14.2 Mounting .55 14.3 Handling .56 14.4 Operating environment .57 14.5 Maintenance.58 14.6 Precautions for actuator with lock.58 15.

Step Motor Controller

Black Red Black Red Shield Black Red Black Red Black Red Black Red Black Red Black Red Black Yellow Light green Light green Gray Gray White White Light brown Light brown Yellow Yellow Light green Light green A1 Light brown Light brown A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 Conductor size: AWG28 Yellow Yellow Light green Light green Gray Gray White White Light brown Light brown Yellow 56

LG1H

Low Profile Single Axis Electric Actuator Series LG1H Series LG1H High Rigidity Direct Acting Guide With coupling Lead screw lead mm Page Model Motor/Screw Mounting Series Motor type Guide type connection orientation Ground ball screw Rolled ball screw High rigidity direct acting Standard LG1H 10 20 10 20 LG1H21 Page 48 to With coupling Horizontal motor guide Construction Page 56 Mounting

LJ1H

Refer to page 100 for part numbers. 55 56 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NC 1 F W X10 Cable entry direction Top entry Cable entry direction Motor specification Power supply voltage Switch Matsushita Electric Industrial Co., Ltd.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

Ionizer Nozzle type IZN10 Series IZS

protection) Power supply voltage 3 x 7.2 (=21.6) Current consumption 50 mA or less (Single unit only) 2 x 3.4 Mounting hole Connection valve 24 VDC 4 W or less 3.5 6.4 Max. load current 80 mA 4 3 2 1 Max. applied voltage 30 VDC OUT Note) 2 x 6.4 Residual voltage 1 V or less (At load current 80 mA) ESD MONITOR 12 35.5 Short circuit protection With short circuit protection 34.5 30 SMC 44 56

Nozzle Type Ionizer

with power supply polarity protection) 38 3 x 7.2 (= 21.6) Current consumption 50 mA or less (Single unit only) 2 x 3.4 Mounting hole Connection valve 24 VDC 4 W or less 6.4 3.5 Max. load current 80 mA 4 3 2 1 Max. load voltage 30 VDC OUT*1 2 x 6.4 Residual voltage 1 V or less (At load current of 80 mA) ESD MONITOR Short circuit protection With short circuit protection 12 35.5 34.5 30 44 56

Compact Cylinder

5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position

One-touch Fittings

15.3 16.3 19.4 13.3 13.3 5.7 6.8 6 3.2 7.1 6.6 3 3.3 Q2 Q2 Oval type Round type Applicable tubing b 8 to 16 4, 6 6 8 KQ2T06-08A1 13.2 9.7 12 10.4 13 17.2 17.3 22.4 14.2 13.3 7.3 8.4 8 4.2 16.4 16.4 4.5 5.3 2 x N L3 L1 M1 Q1 Q1 8 10 KQ2T08-10A 15.9 15.6 13.2 13 19.6 19.2 26.2 15.6 14.2 8.4 9.6 8 4.2 36 27.2 6 8.3 10 12 KQ2T10-12A 18.5 18.2 15.9 15.6 22 21.6 30 17 15.6 9.6 10.7 8 4.2 56

KS/KX

M5, M6> Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5 5.0 3.5 5.0 8 12 24 14 12.8 23 17 6 25.5 26.5 1 8 1 4 17 23 23 29 38 56

Fieldbus System

.: 6, 1/4" 8, 5/16" 10, 3/8" (Station 1) (Station n) P 1 P 1 82.7 63.8 37.6 36.1 13.5 11.6 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A E 4 A 3/5 3/5 E (For DIN rail mounting) 12 10 (Pitch) P = 20.5 25 21.3 23.5 L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 20.5 x n1 + 56 L7 = 47 x n2 + 83.5 14.7 L1: DIN Rail Overall Length (mm) Valve stations I/O Unit stations (n2

energy saving effect

Applicable model Dimension [mm] A B HRSH100---K HRSH150---K HRSH200---K HRSH250-W--K Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port 56 271 609 HRSH250-A--K HRSH300-A--K 372 708 B A Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port Cap 56 Fluid fill port B A (The figure shows the HRSH250-A-20-K.) 178 Options HRSH Series Option