Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x 0.4, depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8, depth 7 20 20 L (mm) Model M MA W H S Z J V K L MXP16-20B 40 30 65 58 20 102 93 82

CL

Lead wire length symbols: 0.5 m Nil(Example) C73C 1 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-2-16 for details.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Z 0.5 46.5 50 37 M 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 13 5 (With stroke adjuster at retraction end) N 1 x F 2 51 (With stroke adjuster at extension end) 25 F 30 30 FF 58 76 46 73 22.5 6 x M5 x 0.8 thread depth 8 6 2 N x M5 x 0.8 thread depth 10 Stroke adjuster at retraction end 6 18 46.5 (With stroke

3 Port Solenoid Valve Series SYJ300/500/700

H -M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

MHZ2/MHZJ2

MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45 25 MHZ2-25S (N) 12 4 55 10 MHZ2-10C (N) 31 Single acting type, normally closed 6 115 16 MHZ2-16C (N) 56 10 240 20 MHZ2-20C (N) 83 14 430 25 MHZ2-25C (N) Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 57 lb

Bernoulli Gripper

Selection example W = M x g x t x 1 n W : Required lifting force [N] M : Workpiece mass [kg] g : Gravitational acceleration [= 9.8 m/s2] t : Safety factor (Recommended value: 2 or more) n : Number of Bernoulli grippers [pcs.] Workpiece mass: M = 0.7 kg Safety factor: t = 2 Number of Bernoulli grippers: n = 2 pcs.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S 1/4 M5 x 0.8 10 One-touch fitting Barb fitting Applicable tubing: T0604 Width across flats 17 Standard specification Accessory specification With pressure gauge With auto drain Bracket mounting size Model Port size B C D A J B F G H K M N P Q E K L AC20D AC30D AC40D AC40D

1

M5 port) 0.06 0.09 0.12 0.22 JCMBmm-m JCMBmm-mF (Basic (Female thread on both covers), Rc1/8, NPT1/8 port) 0.09 0.12 0.16 0.29 (Basic (Female thread on both covers), Rc1/8, NPT1/8 port) 0.08 0.10 0.14 0.24 Basic weight Basic weight JCMMm-m (Male thread on both covers, M5 port) 0.08 0.12 0.15 0.28 JCMMm-mF (Male thread on both covers, M5 port) 0.07 0.10 0.13 0.24 JCMMmm-m (Male thread on both

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

moment 0.3 N m 0.7 N m 0.9 N m 2.9 N m Bearing Bearing Port location Side ported or Top ported Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side ported M5 x 0.8 M3 x 0.5 Port size Top ported M3 x 0.5 M5 x 0.8 1 Single vane 90 can be adjusted to 90 10 (both ends

Prevents Micro-Bubbles

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Sensor (Breathing port) R VXA 2-Q VN PB LVC G H PA C LVA SMC A B LVH N E LVD J B LVQ (F) LQ LVN TI/ TIL PA (mm) Dimensions PAX A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2 LVC3 LVC4 LVC5 LVC6 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55

SZ3000

Weight W (g) (2) SY W = 34n + m + 89 n: Number of SUP/EXH blocks m: Weight of DIN rail SYJ Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides.