Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom Side), Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: M (Fixed SI Unit), Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

•

< II"", ~ ~ _ _ _ _ ...J p",,~ . ~~ pIy G NOIGomna l 1 _ _ .J 1>0'., s.uPply GNO " rm,nal ~ ~ _ _ ~ ~ _~ ~ ~ J f>ooo;ef lluppty GNOIEllmonal ~ ~ _ Construction { Parts List Precautions Installation Use of Toxic, Corrosive, or Flammable Gas Pressure sensor and fitting matenal of this switch J)Apply wrench only to the metal hex section is SUS630 and SUS304.

3M/SMseries

dNrr,'J]7,k Niffi sTrfJ?

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 5) The surface treatment of the lock nut option-J (round type) is electroless nickel plating. 487 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d 2 tubing type AS121F-M3-02 AS121F-M5-02 D2 Applicable tubing O.D. 2 A L4 D1 L3 M T L1 (Hexagon width across flats) H D3 Metric Size

Size/Valve Type: 6 (25A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: L (Low Concentration Ozone Resistant, FKM Seal; Oil-free; NPT Thread)

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

HRX-OM-W038

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-W038 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-M090

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-M090 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-R016

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R016 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-O021

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

CJ2

Bore NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 Clevis pins and set rings are attached.

Heat Resistant 2-Color Indicator

Choice of output types: PNP, NPN How to Order D-M9PJ J M9 N L D Output specifications Lead wire length Symbol Specication L Between the sensor and amplier: 3 m, Amplier section: 3 m Symbol Specication N NPN output P PNP output Z Between the sensor and amplier: 5 m, Amplier section: 3 m D-M9NJ Dimensions [mm] Auto Switch Specications Indicator light D-M9NJ, D-M9PJ (With indicator light) Auto

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

3 Way,3 Port Solenoid Valve NVZ Series

(L) M typ plug connector (M)

NVZseies

(L) M typ plug connector (M) World Wide QS\E Support...

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

K L M N O P Misc.