MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CE

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

CE

5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Digital Flow Switches Series PF2A

output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Electromagnetic Digital Flow Switch

Analog output Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Current output Output current: 4 to 20 mA Max. load impedance: 600 Hysteresis Variable Display method 2-screen (Main screen: 4-digit, 7-segment, 2-color, Red/Green; Sub screen: 6-digit, 11-segment, White) Display values updated 5 times per second Status LEDs Output 1, Output

30

eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2

Digital Gap Checker

L 1 ISA-5-1 73.0 2 ISA-5-2 135.5 3 ISA-5-3 173.0 4 ISA-5-4 210.5 5 ISA-5-5 248.0 6 ISA-5-6 285.5 1.25 8 4.5 7.5 5.5 35 35 With 3 tapping screws (3 x 8) Bracket for centralized lead wire ISA-20 Lead wire with connector ZS-31-B ZS-31-C Straight 5 m Right angle 5 m Centralized lead wire ISA-19-m Stations Part no. 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 15 3-Color Display

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

HEC-OM-S008

. 5-5 5.6 Function codes . 5-7 5.7 LRC . 5-7 5.8 Explanation of function codes . 5-8 5.9 Negative response . 5-12 5.10 Register Map . 5-13 5.11 Communication Format and Examples of Answers from Thermo-con . 5-16 6 Troubleshooting . 6-1 Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Process Pump

Refer to Best Pneumatics No. 5 for further details.

Bernoulli Gripper

or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to read this before handling the products.

MVGQ

Note 2) For the specifying way of ordering numbers for the solenoid valve with adapter assembly, refer to page 10-16-4. 10-16-19 20 Series MVGQ Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 16 100 12 20 25 32 40 50 63 80 D-Z7/Z8 8.5 14 7.5 9.5 9.5 11 11 11 13 13 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 11.5 5 6 6.5 8.5 8.5 9 10

Sine Rodless Cylinder Series REBR Direct Mount Type

5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series REBR Model Selection

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122

ML2B

5 #8 #9 @7 w !6 e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !