CRB2/CRBU2/CRB1

R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4

ZP

P Q R 4 4 6 20.6 21.6 15.6 16.6 S 10.4 12.8 6 a e Y b c d Model ZPR2004U 2 1.2 0.3 4 2.6 4.6 ZPR3507U 3.5 1.8 0.5 7 4.3 7.8 ZPR4010U 4 2 0.8 10 5 11 Flat/Flat with Ribs Dimensions of D are the same.

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

How to Order Specifications and Allowable Load 11 MSQ 10 A90 B A S Grade 1 Note) Particle generation grade Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Number of auto switches Clean Series Vacuum type CRB2 Note) Please refer to Pneumatic Clean Series catalog for further details.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

x 0.8 C 15 18.3 B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

KS/KX

Thread Rotating Torque/Allowable Number of Rotations Applicable tube O.D. 8 10 12 4 6 Rotating torque (Nm) (1) 0.022 0.006 0.012 0.020 0.014 Allowable number of rotations Series KS Series KX (rpm) 500 1500 300 1000 250 1000 500 1200 400 1200 Note1) Value under pressure 0.5MPa Male elbow Component Materials Principal element Series KS Series KX Male connector Body Stud, Holder, Guide Chuck

Trimmer Auto Switch Series D-
7K/D-R
K

Rail mounting type Electrical entry Grommet Oil proof vinyl heavy insulation cable 3.5 0.14 mm2 4 cores 3 m With one e-con connector Note) Lead wire Impact resistance 980 m/s2 Amplifier unit Insulation resistance 50 M (500 VDC) between lead wire and case Withstand voltage 1000 VAC for 1 min. between lead wire and case Ambient temperature 10 to 60 C Enclosure IP67 Weight 58 g (with connector

Digital Gap Checker

If the supply port on the right side is used, arrange the centralized lead wire so that it does not interfere with the control unit. 9: The bracket for control unit will be assembled before shipment. 10: Made to order 11: When the control unit is mounted, the piping specifications of the supply port will be changed due to piping specification of the gap checker. 12: ISO16030 -10No.PS-OMT0002

NARM Series

Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000

Safety Instructions

Do not disassemble or modify the main body. 16-11-3

Thomas Oil-less Diaphragm Compressor Flow Rate: 11 LPM , 11 LPM, Max Pressure: 14.5 PSIG / 1000 bar , 14.5 PSIG / 1000 bar, Voltage (DC): 12, DC Motor Type: BLDC, Item Dimensions: Length: 3.43 in / 87 mm Width: 1.18 in / 30 mm Height: 2.95 in / 75 mm , Length: 3.43 in / 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49 lbs. / .22

Thomas Oil-less Diaphragm Compressor Flow Rate: 11 LPM , 11 LPM, Max Pressure: 14.5 PSIG / 1000 bar , 14.5 PSIG / 1000 bar, Voltage (DC): 24, DC Motor Type: BLDC, Item Dimensions: Length: 3.43 in / 87 mm Width: 1.18 in / 30 mm Height: 2.95 in / 75 mm , Length: 3.43 in / 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49 lbs. / .22

Rotary Actuator

S 1 pc.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17