MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

Clamp Cylinder Series CK1

D-X Individual -X 1333 Series CK1 CKGA80, 100 / CKPA80, 100 Series / With Magnetic Field Resistant Auto Switch (Rod Mounting Style) 3 Dimensions CKGA80 Built-in standard magnet type / with magnetic field resistant auto switch (D-P4DWS type) 60 35 54 + Stroke 60 Speed controller valve Top width across flats 3 Cushion valve Top width across flats 3 10 40 15 10 30 11 11 3 x Rc 3/8 3 x Rc 3/8

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5

Air Combination

(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC60(A)-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC60B-(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

20-1-D to IS10M-60-1-D IS10E-20-D to IS10E-60-D Air flow Air flow 8.Type of scale -15- 9.

Compact Cylinder with Air Cushion

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) 11 60 120 22 6.5 12 YB-05 50, 63 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 32, 40 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 50, 63 14 75 230 28 8.5 16 YB-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YU-08 80 18 90 455 36 10.5 18 YB-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 YU-10 100 12 Series RQ Auto Switches/Proper Mounting Positions and Height

RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YB-10 100 18 90 455 36 10.5 18 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 7-7-15 15 Series RQ Proper Auto Switch Mounting Position (Detection

V

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.78 SOLENOID VALVES SERIES NVFS M O D E L NVFS6000 Position Port Size Number Of Type Cv Response (NPTF) Solenoid Plug-In Factor Time (ms) 3/4 Single NVFS6100 9 60 or less 2 Position 1 10 S Y M B O L S 3/4 Double NVFS6200 60 or less 9 1 10 T E C H N I C A L SPECIFICATIONS S T A N D A

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

High Purity Fluoropolymer

10 39.5 51 55 133 48.5 10 36 Inch sizes H Applicable tubing O.D.

Micro Mechanical Valve Series VM1000

(Total Travel) 60 Panel mounting hole VMG 2 x M20 x P1 Hexagon nut thick 6, across flats 27 VR Max. 10 VR51 Symbol (OUT) 2 VHK 10 12 3 (N.C.) 1 (N.O.) VH VHS 3 x 18 4 x 4.5 mounting hole T.T. 7 N F.O.F. VHS 60 Push button (Mushroom) VM430-01-30R/B/G/Y O.T. T.T.

Power Valve: Economy Valve Series VEX5

10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

7

CK1 36 17 Hole: 18 +0.027 0 CLK2 Shaft: 18 0.050 0.093 33 34 CLKG 28 +0.5 +0.1 34 47 CKQ CLKQ CK CLK 24 75 55 CKQ 17 21 71 90 2 x M6 Thread depth 6 Double knuckle joint CKPA80 Built-in strong magnet type/with magnetic field resistant auto switch (D-P79WSE) 60 35 54 + Stroke 60 Speed controller valve Top width across flats 3 Cushion valve Top width across flats 3 15 10 10 40 11 30 11 3 x

Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

HRX-OM-W058

0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2 Pump

MTS

200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang L (mm) 8-10-

VS7-6

6, 8, 10 Piping SYJ F.

MXW

195 34 63 6 490 MXW25-200 155 275 142 60 225 59 88 6 540 MXW25-225 175 305 165 55 55 245 84 113 7 590 1 MXW25-250 200 335 187 67 60 275 109 138 7 640 1 MXW25-275 225 360 210 80 65 300 134 163 7 690 1 MXW25-300 245 395 232 52 60 60 320 159 188 8 740 2 8-7-19 20 Series MXW Construction !