CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

CXS

MY Standard Stroke CY (mm) MG Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

A_HEC-OM-K001

HF10% or less 10 to 40oC Note 2) HF5% or less Hydrofluoric acid and Nitric acid mixture HNO35% or less Nitric acid HNO35% or less Hydrochloric acid HCl5% or less Copper sulfate solution H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Sulfuric acid H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Ozone 10 to 60oC Ammonium hydroxide NH35% or less 10 to 60oC Note

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Compact Type

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

Compact Type Dual-Rod Cylinder Series CXSJ

Standard Stroke (mm) Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available as a special order.

T

Polyurethane Coil Tubing: Series 10-TCU For details, refer to Pneumatic Clean Series catalog. Specifications 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 10-TCU 10-TCU 10-TCU Model Tubing O.D. (mm) No. of cores 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 Tubing I.D.

Compact Cylinder

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Bore size (mm) 321, 40 502, 63 No. of auto switch mounted With 1 pc. 10 5 15 15 10 10 With 2 pcs. 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 10 Prior to Use Auto Switches

SMC Electronic Switch Series Variations

10 Rc1/8 SUP.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30

3 Port Solenoid Valve

0.015 0.024 0.008 0.016 10-V124A Note 1) Note 1) 10-V124 and 10-V124A: Supply pressure to port 3 and exhaust from port 1.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.