Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 06 (One-touch Fitting ø6), EXH: 08 (One-touch Fitting ø8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 06 (One-touch Fitting ø6), VAC: 06 (One-touch Fitting ø6), EXH: 08 (One-touch Fitting ø8), Accessories: N (w/o Bracket, w/o Silencer)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: J (Rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: K (Non-rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: K (Non-rotating), Stroke: 15mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: J (Rotating), Stroke: 15mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: K (Non-rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: N (Body Class 3, 4, 5, 6 - NPT 1/8"), Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment)

Body, Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 15 (ø1.5), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: N (For Pressure Switch for Vacuum: None; Pressure Sensor Assembly: None), Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With

Size: 5 (50), Valve Type: 1 (Normally Closed), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 06 (Thread; 3/4), Thread Type: N (NPT), Rated Voltage: B (24 VAC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Oil-free Option: None, Bracket: B (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: F (G), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature:

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket:

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket:

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature: °C, Bracket: None, Calibration Certificate