High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

SV1000x-OME0002

. 2020 SMC Corporation All Rights Reserved SV1000*-OME0002-C

Rotary Table/Vane Style Series MSU

MSUA3 MSUA3-S/SE 8 x M4 x 0.7 depth 7 C 58 36 44 B 27 30 4 x M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (Positioning pin hole) 22.5 29 2.5 3 3 x 3H9 depth 3 +0.025 0 2 x 4.5 through ( A , B , C ) 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2 x 4.5 through 6 2 x M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.

Ｖ cylinder

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 13 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

Air cylinder (Series compatible with secondary batteries)

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 17 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

Air cylinder

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 19 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth.

Air cylinder

C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 25 3-2-1. Disassembly / Reassembly C a u t i o n Disassemble and assemble the cylinder on a clean cloth in a clean location. Perform on a clean cloth. Make sure no particles are present. Do not scratch the seals.

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

IDX-OM-W013

IDX-OM-W013-C PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) This manual is intended to explain the installation and operation of the product.

IDX-OM-V022

IDX-OM-V022-H Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

IDX-OM-W028

IDX-OM-W028-B Operation Manual PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) Please read this manual prior of using the air dryer. Keep the manual readily available for reference.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

size Positions C 13 16 13 16 13 15 13 16 13 15 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 Cv 3.0 4.0 3.0 4.0 3.0 3.5 3.0 4.0 3.0 3.8 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.10 Cv 4.0 4.4 4.0 4.4 4.0 3.7 4.0 4.0 4.0 4.4 C 18 18 18 18 18 15 18 16 18 19 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Single

IDX-OM-W093

IDX-OM-W093-B / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC *1) JIS B8370 *2) ISO4414 *1) ISO4414Pneumatic fluid power Recommendations for the application

IDX-OM-W029

IDX-OM-W029-B / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General

IDX-OM-W017

IDX-OM-W017-E / Series IDFA3E-23-A,C IDFA4E-23-A,C,L,R,T,V IDFA6E-23-A,C,K,L,R,T,V IDFA8E-23-A,C,K,L,R,T,V IDFA11E-23-A,C,K,L,R,T,V IDFA15E1-23-A,C,K,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO 4414: Pneumatic fluid power General rules and safety requirements for systems and

Digital Flow Switch (Remote type sensor unit)

C: Contents revised in several places. D: Contents revised in several places. E: Contents revised in several places. [September 2017] F: Contents revised in several places.