Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

(Up to 22 solenoids possible) Specified layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

PF2A

Rc NPT G M12 3 m lead wire with connector Without lead wire Symbol N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Heatless Air Dryer ID Series

Indicator set Note) Adsorbent and adsorption tube filter for one air dryer (two adsorption tubes), set of O-rings How to Order ID400 ID 20 02 0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

Series KJ One-touch Mini

How to Order KJ H M3 02 Model Male connector Straight union Different diameter straight Port size H M3 M5 00 23 04 M3 M5 Same diameter tubing 3.2 4 S L W Hexagon socket head male connector Male elbow Extended male elbow Male branch tee Union tee Male run tee Union "Y" Different diameter union "Y" Plug-in reducer Bulkhead union Note 1) Note 1) Note 1) Different diameter tubing O.D.

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

S Couplers KKA Series Stainless steel type

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Availability Plug Yes No No Yes Socket Yes Yes No No Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

IR1000/2000/3000

5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range Nil For IR1000/2000 series Port size Bracket, Name plate, Mounting on the opposite side R Note 7) 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Application Size Symbol IR1000 IR2000 IR3000 01 02 03 04

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

JIS Symbol G Port size Symbol Port size Size 30 1/4 50 $ 60 75 100 02 03 04 $ Bracket Assembly (Accessory) Part No. $ $ $ $ $ 3/8 Part no. Applicable model BM64 BM65 $ $ $ 1/2 IDG30

Series IDK Moisture Control Tube

Moisture control tube effective length Symbol 02 04 06 O.D. 2 mm 4 mm 6 mm Effective length 100 mm 200 mm Symbol 100 200 Dimensions Unit: mm Model Full length L Nominal effective length X L O.D. x I.D.