Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual:

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: Operation

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: w/o Operation Manual, w/o Calibration

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

LEYx-OMZ0015

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver I/O cable length [m] Applicable stroke table* -10- 100 B 200 T9 B 200 T9 B Motor mounting position Motor type Size 100D 100 Symbol Type Output Size driver Nill Top mountain LECSB2-T9 LECSC2-T9 LECSS2-T9 R Right side AC servo motor parallel Absolute 750W 100 T9 L Left side encoder

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

30

t y e i w Note Manganese phosphate Chromated Description Material Steel Aluminum Steel Steel Synthetic rubber Steel Steel Steel No. 1 2 3 4 5 6 7 8 Stud Case Ring Cap Dust cover Set screw Rod end nut Washer Black zinc chromated Zinc chromated Zinc chromated J J Dimensions JC20 to 63 M Center of sphere M U U D F G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore

MLU

Size Pressure receiving area equivalent to that of 25 type Pressure receiving area equivalent to that of 32 type Pressure receiving area equivalent to that of 40 type Pressure receiving area equivalent to that of 50 type 25 32 40 50 Locking direction F B Extension locking Retraction locking Port thread type Rod end shape 25 M threads Rc NPT Stroke (mm) Nil Nil M Rod end female thread Rod

Speed Controller: Standard Type In-line Type AS Series

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 651 AS Series Construction: AS2000/3000 Component Parts No. Description Parts no.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 22 lb

CG1x-OM0006N

P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

AF800/900

When 40 m is rquired: 1-40 2 If indicating 7 only, the filtration rate is 5 m. Optional filtration rate is required, indicate like 17-. Ex.) When requiring stainless steel and 40 m; 17-40 3 The bowl of series AL is used. 4 This symbol indicates the port size.