Cylinder Port: NPT, Arm Opening Angle: 45°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A012 (Straight Machined ref NAAMS ACA112M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 75°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A018 (Straight Machined ref NAAMS ACA118M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 75°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A018 (Straight Machined ref NAAMS ACA118M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A012 (Straight Machined ref NAAMS ACA112M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: -X167USA (Turk NPN AC), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: -X167USA (Turk NPN AC), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A046 (70mm Offset Machined ref NAAMS ACA150M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A010 (Straight Machined ref NAAMS ACA110M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A010 (Straight Machined ref NAAMS ACA110M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A018 (Straight Machined ref NAAMS ACA118M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A018 (Straight Machined ref NAAMS ACA118M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 60°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A018 (Straight Machined ref NAAMS ACA118M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A018 (Straight Machined ref NAAMS ACA118M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A001 (Straight Plain ref NAAMS ACA100M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A001 (Straight Plain ref NAAMS ACA100M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A050 (70mm Offset Machined ref NAAMS ACA154M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A050 (70mm Offset Machined ref NAAMS ACA154M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 45°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A014 (Straight Machined ref NAAMS ACA114M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A014 (Straight Machined ref NAAMS ACA114M), Painted Arm: P (Paint)

PFM7.eng

Body [ on] With filter [oFF] Unused [oFF] Unused [AFL] Analogue output filter [Eco] Power saving mode [P in] Security code DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Lead wire to supply power and transmit output signals.

PFMC.eng

[H_1] Hysteresis of OUT1 25 50 100 [F 3] [ r ES] Response time [ 1.0] 1 second Mounting screws Caution Knurled part [P_2] Set value of OUT2 [F10] [ SUb] Sub display [ oUt] Set value 500 250 1000 Reset the accumulated flow. (Press the and buttons simultaneously for 1 second or longer).

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

FEP Tubing (Fluoropolymer) Series TH

Note 4) Consult P/A if using any other fluids. Max. Operating Pressure 3 TH0402 Max.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Atmospheric release port Air tube Recommended tubing (P/A) TU0425 (polyurethane)

SY3000/5000/7000 Series Plug-in Type

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be 3% or less of the rated voltage. 6.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A045 (120mm Offset Machined ref NAAMS ACA045M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A045 (120mm Offset Machined ref NAAMS ACA045M), Painted Arm: P (Paint)