High Vacuum Slit Valve

Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7. Troubleshooting 12 AttachmentProcedure for Maintenance 13 to 15 1 - SLIT VALVE Safety Instructions C These safety instructions are intended to prevent hazardous situations and/or equipment damage.

PSxx-OMR0005CN

RoHS PPA100MPa LCD"Err" 6 LCD"CAL" "POWER3 "POWER6 "POWER ON OFF ON 6 3 OFF 5 OFF () POWER "POWER 3 3LCD MPa bar MPa (PPA100) (PPA101) (PPA102) MPabar PSI kgf kPabar PSI inHg mmHg kPabar PSI kgf "POWER"+"LIGHT "LIGHT "POWER 3 )inHg )OFF"P"b LCD "P LCD "b POWER POWER POWER ON5 OFF () ( ) 6LCD "L" POWER"+"LIGHT 6 "LIGHT "POWER 6 6LCD "CAL LDC"-" LCD"Err" 0, 0, LCD LCD52 30 30"

Smooth Cylinder

Grease pack part no.: GR-L-005 (5 g), GR-S-010 (10 g), GR-L-150 (150g) 48

Compact Cylinder/Non-rotating Rod: Double Acting, Double Rod

6 !7 !8 Piston seal Rod seal for non-rotating NBR Rod seal Set of left nos. !5, !6, !7, !8. Gasket Seal kit includes !5, !6, !7, !8. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 77

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

Compact Cylinder with Air Cushion

6, !7, !8. Needle gasket 15 !6 !7 !8 NBR RQB80-PS RQB63-PS Piston seal NBR Rod seal NBR RQB100-PS Tube gasket NBR Seal kit includes !6, !7, !8. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 12 to 15 are non-replaceable parts, so they are not included in the seal kit. 83

SYJA7000 Series

S: Effective sectional area (mm Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 6 SYJ7000-OMR0001 TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

Liquid Collector Exhaust Pressure Type AEP100-02

Exhaust port effective area 21 mm2 Port size 3-PT 1/4 Filtration 40 mesh (Gauze) Weight 0.8 kg 1073 AEP100-02 Operating Conditions Working Principle Bore size 40 mm or more Stroke 100 mm or more Cylinder 100 mm/s or more Piston speed 6 / 4 10 m or less Tubing length on IN side 8 / 6 5 m or less Circuit Example Nylon tube 6/4.5 Max. length 10 m 8/6 Max. length 5 m When the exhaust

08-cs2y-e

Grease pack part no.: GR-L-005 (5 g), GR-S-010 (10 g), GR-L-150 (150g) 48

SYJA300

N.O. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa Flow Characteristics/Mass Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Mass (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 34 N.O.

VFM300

6 NBR, Brass Valve y Brass Piston guide !7 Stainless steel Return spring u Brass Piston guide for end cover !8 Stainless steel Return spring i Polyacetal Piston !9 Stainless steel Valve spring o Polyacetal Piston for end cover @0 NBR Mini Y packing !0 Polyacetal Guide bushing NBR Mini Y packing @1 !

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

For details about auto switches with pre-wired connector, refer to SMC Best Pneumatics 2004 Vol.6 catalog. D-A9, M9, M9W, M9AL are shipped together, (but not assembled). (Switch mounting bracket is only assembled at the time of shipment.)

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

Nil S n Bearing type M L Slide bearing Ball bushing bearing Auto switch Nil Without auto switch (Built-in magnet) Bore size 12 16 20 25 32 For the applicable auto switch model, refer to the table below. 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Cylinder stroke (mm) Refer to Standard Stroke on page 339.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

ISO Standards [ISO/21287] Compact Cylinder 20,25,32,40,50,63,80,100 Series C55 How to Order B 20 10 C55 B 20 10 M9B S CD55 With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

The overall length is longer than the cylinder with air cushions because the bumpers are attached to the both sides of the piston as follows. 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm, 125: +12 mm If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

VH

Rc NPT G Function 0 1 2 3 position closed center 3 position exhaust center 2 position Flow Characteristics VH200 VH300 VH400 Effective area S = 55 mm2 Effective area S = 7.5 mm2 Effective area S = 20 mm2 Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Valve

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

*:Auto switches are shipped together, (but not assembled). 432 Compact Guide Cylinder MGP Series Specications Bore size [mm] 12 16 20 25 32 40 50 63 80 100 Action Double acting Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.12 MPa 0.1 MPa Ambient and uid temperature 10 to 60C (No freezing) Piston speed *1 50 to 500 mm/s 50 to 400 mm/s Cushion