ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Series MXP Precision Air Slide Table

36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55% Z 3 2-M40.7, 6 deep V 2-M30.5, 4 deep K 5 4 G Max. 3 7.5 M Stroke:S MXP12-15 Width across flats 2 Width across flats 6 A Piping port 2-M50.8 14 H (Plug:M-5P) 8 M40.7 18.2 8.5 4.2 25 24 8.5 4-M40.7 4.5 deep 4-M50.8 Bottom hole diameter 4.2 A 19 1.5 20 220.05 W 0.50.05 B D Piping port 2-M50.8 33

VQC

or less 25 or less 0.70 Rubber seal VQC1301 0.65 0.20 0.16 0.42 0.18 26 or less 20 or less 0.68 Metal seal VQC1400 0.72 0.15 0.16 0.25 0.18 Symbols Exhaust center 78 33 or less 25 or less 0.70 Rubber seal VQC1401 1.0 0.20 0.16 0.30 0.25 2-position single 26 or less 20 or less 0.70 Metal seal VQC1500 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less 0.85 Rubber seal

HRX-OM-S004

5.13.1 Temperature unit change. 5-33 5.13.2 Setting/checking of temperature unit change . 5-33 5.14 Pressure unit Change . 5-34 5.14.1 Pressure unit change . 5-34 5.14.2 Setting/checking of pressure unit change . 5-34 5.15 Data reset function . 5-35 5.15.1 Data reset function . 5-35 5.15.2 How to operate reset function . 5-35 5.16 Accumulated Operating Time Reset Function . 5-36 5.16.1 Accumulated

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

x n + 63 L2 = 33 x n + 75 363 384.5 Stations L L1 L2 393 405 594 615.5 L3 = 33 x n + 264 L3 = 33 x n + 285.5 360 372 561 582.5 327 339 528 549.5 294 306 495 516.5 261 273 462 483.5 228 240 429 450.5 195 207 396 417.5 L3 (MP) L3 (AP) 1176 Made to Order Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System How to Order How to Order Manifold VV5FS3

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

PFxx-OMY0005

OUT2 17 OUT output bit Accumulated 1 32 Accumulated 2 33 Flow rate 1 34 Flow rate 2 35 Connected with hardware output SW output bit (Not connected as OUT2 does not have the hardware) Temperature 1 36 Temperature 2 37 Pressure 1 38 Pressure 2 39 Pulse output 2 65 This is valid only when the output object of OUT2 is pulse output.

CE

CV MVGQ CC Preset values A B Preset values Allowable values Allowable values RB Counting direction Counting direction ( + ) () ( + ) () J When moving in (+) direction OUT When moving in (+) direction OUT D-X When moving in () direction OUT When moving in () direction OUT 20Data 10-12-33 33 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal

Rotary Table: High Precision Type

Load 26 Table rotation range 27 Calculation example of load condition 28 Using body as flange 29 Piping 30 External stopper 30 Mounting position of external stopper 30 Precautions for using external stopper 31 Internal construction and component parts 31 Internal construction of rotary table 32 Rotary table with auto switch 32 How to order (with auto switch) 32 Applicable auto switches 33

2–4

7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

Electric Actuators

Stroke + 334 (364) 33 2-T-slot 2 33 90 62 Stroke + 32 3-8H10 depth 20 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 11.5 Stroke + 216 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

Combination Cylinder

38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23 25 28.5 33 35 40 40 50 178 193 196 221 30 30 35 35 16 17 17 17 55 62 62 70 198 215 218 241 11 11 11 12 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Round head combination screw Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Blanking plate A Manifold gasket A P P A Manifold gasket SYJ300-5-12 Manifold gasket SYJ300-5-6 Applicable base Sub-plate 10-SS3YJ3-20(-Q) 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.

CNA

B A 33 B D-A3 D-G39/K39 D-A3C D-G39C/K39C G 1/2 (Applicable cable O.D. 6.8 to 9.6) Auto switch G 1/2 HW A 49 B (Applicable cable O.D. 6.8 to 9.6) Hs 49 Hs 34 56 S M C A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B

CNA

MXQ 24.5 @ Ht MXF A 30 (33) B A 33 B 14 MXW *( ): D-F5LF MXP D-A44C D-A44 MG G(PF)1/2 (Suitable cable O.D. 6.8 to 11.5) Auto switch MGP HW A 49.5 B G(PF)1/2 (Suitable cable O.D. 6.8 to 11.5) MGQ @ HS 31.5 MGG 56 MGC A 36 B 36 MGF Auto switch CY1 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-B5/B6 D-B59W D-G5l D-K59 D-G5NTL D-G5lW D-K59W D-G5BAL D-G59F Auto switch

Fieldbus system PROFIBUS DP compatible SI unit

Red/green ST(M) LED is flashing alternately : Refer toTtroubleshooting (page 33), for the further details of countermeasures. -24No.EX-OMN0028-B PROFIBUS DP status LED Display Contents The communication with the master has been established properly, or the power supply for control and input is OFF.