Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Series 10-MGF Guide table ø40, ø63, ø100

Port size Lubrication Model Rubber Air 10-MGF40 10-MGF63 10-MGF100 1/8 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B C D E 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7 8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 90 Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective orifice(mm2 Part No. A B C ) 2.1 4.0 12 14 5 8 1.8 2.5 M-5AN-4 M-5AN-6 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

VFR3000-OMJ0001

10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?