HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Conduct the following inspection before operation. a) Confirm that the power supply line and each signal line is not damaged. b) Confirm that the power supply line and each signal line is not loosened. c) Confirm that the electric actuator/cylinder/controller/driver is not mounted loosely. d) Confirm that the electric actuator/cylinder/controller/driver is operating correctly. e) Confirm

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

anodized Leakage [Pam3/s or less] *1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

XLA- ∗ -F7NJ ∗ - ∗ Series

D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

VFR3000 Series

switching device because of the passing leakage voltage Additionally, when compressed air within the pressure through the C-R circuit.

Digital Pressure Switch

Connector pin numbers -18No.PS-OMM0005-J Internal circuit and wiring example Z/ISE10(F)Output specification -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 2 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage 2 V or less -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 2 V or less Analogue voltage output Output impedance approx. 1 k -E

SYJ Series

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 4.

PF2D

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Title not found

Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

        Series VKF300

5<3'95 % A " 8 " $ )% % 8 % =) *% $ ) 2% 8 % " 1 ,% 2 % ) .BB & A & 1% % $) $ ) ) ) ) ) 88 % ,) ; ' ; 8 1 ) /% ) / , A & 1% % '$ , $ 3 :; C $ 1 ,) ; ' ; ) ) ) ) 88 % /% ) / VQD VKF .$ VK VT VS t o r e q y u i w & q w e r t y u & D % % ' % % ' % % ! ! ! , !%,' ? !2! 8 % 8 % ? ( , 0( , = ) % $ B /EB3A /EB '!'

KP/KPQ/KPG

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

AWM20 to AWM40

Float type auto drain (N.O.) b Nil C D Float type auto drain Note 3) Option + Without pressure gauge Square embedded type pressure gauge Round type pressure switch NPN output / Wiring bottom entry NPN output / Wiring top entry PNP output / Wiring bottom entry PNP output / Wiring top entry Nil E G E1 Note 5) Pressure gauge c Digital pressure switch E2 Note 5) E3 Note 5) E4 Note 5) + Nil 1

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note

Thermo-chiller

Model HRS200-Am-46-mS Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.65 Control method PID control Ambient temperature/Altitude1, 7 C Temperature: 5 to 45, Altitude: less than 3000 m Circulating uid1, 2 Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity3, 7 kW 20.5 Heating capacity4 kW

KT10

How to Order Port Number e r KT10 R C 4P 4 1 0 0 Installation option Delivery pressure Code Installation Panel installation Delivery pressure Code 5 to 500 psig (0.034 to 3.4 MPa) 5 to 800 psig (0.034 to 5.5 MPa) 10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) 1) No code

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

10 1 Non plug-in VFR2 02 SV CE-compliant SYJ Q CE-compliant Nil Pilot valve manual override SZ Electrical entry: D/DO, Y/YO and F only Nil: Non-locking push type B: Locking type B (Tool required) C: Locking type C (Lever) A: Non-looking push type A (Extended) VP4 Symbol 2 position single S0700 1 Pilot type VQ Nil R Internal pilot External pilot Option 2 position double Option VQ4 Option

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

FGX-OM-R008

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

 MICRO MIST SEPARATOR REGULATOR 

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.