Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

O

To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

O

To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

25

Avoid using in a place where there is a strong magnetic noise (strong electric field, strong magnetic field, or surge). j. Avoid using in a place where static electricity is discharged to the body. k. Avoid using in a place where a strong high frequency occurs. l. Avoid using in a place where this product is likely to be damaged by lightning. m.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

J Setting of security code (F81) The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.

Air Cylinder

Extend upward from 300 mm/s on the horizontal axis of the graph to the intersection point with the line for a tube bore size of 50 mm, and then extend leftward from this point to find the load of 40 kg. 4 JMB Series Dimensions Basic: JMDBB MM Width across flats KA 2 x P (Rc, NPT, G) 4 x J G G D E B C H1 AL A N F H ZZ + Stroke S + Stroke N M K B C B1 Dimensions [mm] Bore size Stroke range

Dedicated Controller

(P-no.) label Condition jump General purpose input no., State OR input condition jump command J-OR (P-no.) label Program control commands T-bracket Parameter value Classification Function Instruction Jump Unconditional jump command (P-no.) label JMP Subroutine call command (P-no.) label CALL Sub-routine Subroutine end declaration RET Loop start command Loop frequency FOR Loop Loop end command

Fieldbus System

P, E port entry, SUP/EXH block assembly External pilot G H J Internal pilot U D B Internal pilot, Built-in silencer C Note) E Note) SI Unit common, End Plate type P, E port entry U side (2 to 10 stations) P, E port entry D side (2 to 10 stations) P, E port entry both sides (2 to 24 stations) Power supply with M12 connector SI Unit common Power supply with 7/8 inch connector Nil Without SI

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Oil Filter FH150 Series

View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 523 FH150 Series Dimensions Differential pressure indication switch 62 Differential pressure indicator 16 (65) 29 A E F (34) 29 2 x Rc (d) J H 29 G OUT IN IN OUT Differential pressure indicator Differential pressure indication switch D (Element removal dimension) B C (mm) d A B C D E F G H J Weight

Suction Filter with Case FH99 Series

A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1