Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Extra Bottom; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge

Model: 02 (0.28 Cv), Material: S (316L SS Secondary Remelt), Surface Finish: 15 μin. (0.4 μm) Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connection 1: MV6 (3/8 Inch Face Seal, Male), Connection 2: MV6 (3/8 Inch Face Seal, Male), Connection 3: No Port, Connection 4: No Port, Face to Face Dimension: 2.12 Inch (53.8 mm) Standard for TW4; or Not Applicable to All Other Connections, Seat

Model: 02 (0.28 Cv), Material: S (316L SS Secondary Remelt), Surface Finish: 15 μin. (0.4 μm) Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connection 1: FV4 (1/4 Inch Face Seal, Female), Connection 2: FV4 (1/4 Inch Face Seal, Female), Connection 3: No Port, Connection 4: No Port, Face to Face Dimension: 2.12 Inch (53.8 mm) Standard for TW4; or Not Applicable to All Other Connections, Seat

Model: 02 (0.28 Cv), Material: S (316L SS Secondary Remelt), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PWA (1-In; 2-Out), Connection 1: MV4 (1/4 Inch Face Seal, Male), Connection 2: FV4 (1/4 Inch Face Seal, Female), Connection 3: No Port, Connection 4: No Port, Face to Face Dimension: 2.12 Inch (53.8 mm) Standard for TW4; or Not Applicable to All Other Connections, Seat Material: PCTFE

Model: 02 (0.28 Cv), Material: S (316L SS Secondary Remelt), Surface Finish: 15 μin. (0.4 μm) Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connection 1: FV4 (1/4 Inch Face Seal, Female), Connection 2: FV4 (1/4 Inch Face Seal, Female), Connection 3: No Port, Connection 4: No Port, Face to Face Dimension: 2.12 Inch (53.8 mm) Standard for TW4; or Not Applicable to All Other Connections, Seat

Model: 02 (0.28 Cv), Material: S (316L SS Secondary Remelt), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connection 1: TW4 (1/4 Inch Tube Weld), Connection 2: TW4 (1/4 Inch Tube Weld), Connection 3: No Port, Connection 4: No Port, Face to Face Dimension: 1.75 Inch (44.5mm), Seat Material: PCTFE (Standard)

Compact Vacuum Ejector Series ZA

02 Symbol 0 2 3 5 6 P Applicable tubing O.D.

VHS

VM/VR w Negative pressure is not applicable. It will cause malfunctions. Components Parts VH No. Description ZDC2 ADC12 Material Note Selection Valve guide Body q Chromated Chromated Chromated w e r t y u i o !0 !1 !

FH150

Hydraulic fluid Petroleum Water-glycol, Emulsion Phosphoric ester 0 1 2 N W V Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 90.00000 lb. N59.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90.00000 lb

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

Manifold Specifications

With coaxial fitting Plug-in type/Non plug-in type Piping man-hours reduced One-touch piping 1/2 the number of tubes For details, refer to catalog (CAT. 02-5). For details, refer to pages 3-7-19 and 3-7-20.

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Stainless steel Aluminum die-casted Material Note Spool/Sleeve Body Platinum silver w e Sub-plate 02 03 Aluminum die-casted Platinum silver Sub-plate Assembly Part No.: VS3110-SReplacement Parts Mounting bolts and gaskets are not attached. Part no. VS3115-G Description Material No.

Filter Regulator AW30, 40

Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

IP65 enclosure is standard Easy to use terminal block type Terminal block How to Order Valve + Sub-plate VQ2 1 0 0 5 W 02 Entries are the same as for standard. Thread type Nil RC N NPT T NPTF Enclosure F G Dustproof Nil IP65 (dusttight/splash proof) W Note) Note) Valve specifications are IP65.