Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

10 to 50(No freezing) Mounting orientation Unrestricted Note5) Enclosure Equivalent to IP40 Weight 90g(Body ported)85g(Base mounted) Rated voltage 12VDC, 24VDC Allowable voltage fluctuation 10% of the rated voltage Note6) Type of coil insulation Class B Lead wire AWG20(Outside diameter of insulator: 1.79mm) Power consumption Operation noise 60dB(A) or less Note7) 4W 9W 17W Note1) The values

10-cy1l-e

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 114

10-cy3b-e

9 6, 10: Not available Wear ring A Special resin CY3B6-PS 6 CY3B6-PS Wear ring B Special resin Set of left nos. !6, !7, !8, !9 CY3B10-PS 10 CY3B10-PS Piston seal NBR Lubretainer 6: Not available Special resin CY3B15-PS 15 20 25 32 40 50 63 CY3B15-PS CY3B20-PS CY3B25-PS CY3B32-PS CY3B40-PS CY3B50-PS CY3B63-PS CY3B20-PS Cylinder tube gasket 6, 10 only NBR CY3B25-PS Set of left nos. !5, !

AS

AQ Body B AS100P AS200P AS250P AS300P Model Rod and applicable tubing O.D. (Metric size) ASV 4 6 6 10 8 4 Flow rate [L/min (ANR)] It may damage the body A or fittings.

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

10-cy1s-e

Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Number of auto switches Bore size (mm) Nil S n 2 pcs. 1 pc. n pcs. 10 15 25 10 15 25 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

KFx-OMV0011

Specifications 9-10 4. Troubleshooting 10 5. Construction 11 6. Applicable Fluid List 12-13 2 - KFG2 Series Stainless Steel 316 Insert Fitting Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Electro-pneumatic proportional valve

In that case, loosen the self-up screw 3f, insert the lead wire into the bracket 3d and screw in the screw again. b) The maximum size of the crimped terminal 9 is 1.25mm2 to 3.5 for O terminal and 1.25mm2 to 4 for Y terminal. c) Use a cable with outside diameter of 6 to 12mm for the cable 8.

Liquid Dispense Pump (solenoid type)

Doc. no.LV10***-OMS0002-B PRODUCT NAME Liquid Dispense Pump (solenoid type) MODEL / Series / Product Number Series LSP Contents Index Feature, Application Example 1 How To Order 2 Specifications 2 Construction 3 Dimensions 4-5 Specific Product Precautions 1 6 Specific Product Precautions 2 7 Specific Product Precautions 3 8 Safety Instructions 9 Countermeasures 10-12 1 2 3 4 5 6 7 8 9 The

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number)

Model: 10 (Side Ported), Connector Type: FW (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Lock-up Cylinder/Double Acting, Single Rod Series CL1

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g, 125 to 160: 40 g). Order with the following part number when only the grease pack is needed.

Series: 5 (JSY5000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C10 (ø10 One-touch Fitting)

Series: 3 (JSY3000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)