Type of Actuation: 1 (2 Position Single), Manifold Type: 60 (Body Ported Plug-in Cassette), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Stations: 3 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

Valve Stations: 3 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot Type: R (External Pilot), A, B Port Size: N7 (1/4" One-touch Fitting)

Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block: None, Input Block COM: +COM, Stations: 11 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: DAN (Negative Common, PNP; EtherCAT®; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 12 (12 Stations, All Double Wiring), Port Size: N7 [4(A)/2(B) Port: ø1/4"; 1(P)/3(EB), 5(EA) Port: ø3/8"], Thread Type: One-touch: None; Thread Piping: Rc, Option: P (Trim Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: EB (EtherNet/IPâ„¢, IO-Link Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10S6 (Side Ported), SI Unit Specification: EB (EtherNet/IPâ„¢, IO-Link Units), SI Unit Output Polarity, End Plate: 4 (SI Unit Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 7 Stations, P,E Port, SUP/EXH Block: F (B Side, 2 to 24 Stations, Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: N7 (1/4" One-touch Fitting)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: Y [DIN Terminal w/Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting),

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: N7 (1/4" One-touch Fitting), Thread

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication