VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH N.O. LVD Variations LVQ Valve Electrical entry LQ OUT Grommet Conduit DIN terminal Conduit terminal LVN Normally closed (N.C.) IN TI/ TIL OUT Normally open (N.O.)

GA342

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications VR Operating type Air operated type Type of actuation N.C./N.O.

MGQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Slide bearing Slide bearing Strength against side load is more than 2 times as compared conventional stopper cylinder. Ball bushing bearing Smooth operation is suitable for pushing, lifter and applications where high precision is required.

PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to 4 l/min (PF2D504) 1.8 to 20 l/min (PF2D520) 4.0 to 40 l/min (PF2D540) ISA2 IS ZSM Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool.

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

MXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Thread for work mounting Helisert is used for improved strength.

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flow characteristics: 4/2 5/3 (A/B R1/R2) VQZ VQD High speed and long service life DIN terminal is available with dust tight/low jetproof (IP65) type.

CRQ2

S: Upper 90 Lower 180 11-8-6 7 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Size 20/30/40 TF effective depth TL TA TB 45 BE CA CA CRB2 CRBU2 BU CRB1 MSU 8JJ (Opposite side 4 locations) 2-J through (Opposite side JA counterbore depth JB) BD B CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

0 Insert pin assembly replacement screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Cut the end of the tubing y at a right angle and pass it through the fitting nut u.

Table of Contents

Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1% F.S. 1% F.S.

C95

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting & Piping Caution 1.

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q w e r t y u i o !

Auto Switch Guide

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Other Warning 1.

RSQ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting style For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

IR1000/2000/3000

AF Recommended Proper Torque (Nm) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR1000 IR2000 IR3000 12.5 21 21 IR 4.

LX

Caution 299 92 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LX Mounting Series LXP Actuator mounting Work piece mounting 1. Tapped holes 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

VP3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Single Pilot option VT Body size Nil Standard (Internal pilot) 1 4 6 1 2 1 External pilot VP 8 1 2 1 Type of actuation VG Body ported 5 Body type N.C. (Normally closed) A N.O.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port with sub-plate M5 3 position closed center JIS Symbol

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com : Common stroke for MGQ and MGP : For MGP CX DSeries MGG Bore size (mm) Standard stroke (mm) Basic cylinder with integrated guide rods Long stroke is available.