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ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption 150 50 50 75

(Crimping tool: DXT170-75-1) Misc. Power Supply Warning 1. Vacuum pressure switch: The performance is not affected even if a momentary pressure of approximately 0.5 MPa is applied (during a vacuum break). However, make sure that a constant pressure that is higher than 0.2 MPa is not applied.

Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm) Maximum suction flow rate (l/min (ANR)) 18 24 36 40 20 26 36 38 45 Air consumption (l/min (ANR)) Diffuser construction Model S ZMA05H ZMA07H ZMA10H ZMA13H ZMA07M ZMA10M ZMA13M ZMA13S ZMA15S 0.5 0.7 1.0 1.3 0.7 1.0 1.3 1.3 1.5 12 23 46 95 16 32 70 75

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U

) NAC5o00 % . 1 lt.8 10.7 r.9 3.5 3.0 2.6 4.1 2.O 0.5 0.6 o4 2.1 4.5 t l . 7 NAC5500 12.2 1.9 3.7 3.0 2.6 4.I 2.0 0.5 0.6 0.4 4.6 t2.2 NAC6(x)O 11.2 L9 3.7 3.0 2.6 4.1 2.O o5 0.6 0.4 4.6 122 Metal BovYl Option Air Combination Set Air Filter*Regulator Series NAC 5O2O,5520, 6020 Specilications Attachment/Accessory (Optional) ruvor-ff,l 'Cordltionsi supply pr6srre-105 psig, Setting prssure-75

Number of ports 2 2 3 3 2 Fluid Note 1) Air, Water, Pure water, Diluent, Cleaning solvent Operating pressure range 0 to 0.25 MPa 75 KPa to 0.25 MPa Orifice diameter 1.5 mm 1.4 mm Body ported type Flow characteristics (Cv factor) 0.04 0.03 Response time 10 ms or less Leakage Zero leakage, either external or internal (at hydraulic pressure) Proof pressure Note 2) 0.38 MPa 0 to 50C Ambient temperature

3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in Type

Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted (Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75

Barb elbow Barb fitting Barb one-touch Reducer Port size M3 x 0.5 M5 x 0.8 Tubing size 3.2 4 Port size M3 x 0.5 M5 x 0.8 Fitting size 3.2 4 Piping for compact actuator Scale :100% Scale :100% Scale :100% Piping for compact pressure sensor 4 x 7 Scale :100% Sectional area 113.04mm2 4 75% Reduction 2 x 7 Sectional area 2 28.26mm2 Easy size reduction Reduction of the tubing size from standard

Syrnmetric mour a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a Bearing type Bore size/Stroke for basic type 1D, t5,20, 25, 3D, 35. 4t', 45. 50 60,70, 75,80, 90, 100 XBl1: Long stroke For dual-double-rod type, compact type & end-lock type Avdibble lor basrc iype only For alr cushion type 20, 25, 30, 35, 40,45. 50,60, 70, 75

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 5 to 50 5 to 55 Inlet air temperature (C) Note 1) 5 to 55 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) 5 to 50 Standard performance 20 Inlet air flow rate (L/min (ANR)) Note 2) 625 62 125 250 375 Standard performance conditions Outlet air flow rate (L/min (ANR)) 50 100 200 300 500 12 25 50 75

Wide range of flow measurement with one product 6000 10 12000 Applicable flow range [L/min] Port size 30 60 120 500 1000 3000 30 3000 3000 L type PF3A703H 1 60 6000 6000 L type PF3A706H 1 1/2 120 12000 12000 L type PF3A712H 2 Pressure loss: 75% reduction*1 Improved drainage and resistance to foreign matter (20 kPa / 5 kPa) *1 Compared with the current model (PF2A7H/Large flow type).

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

(PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75

adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt Configuration Shock absorber model MY1 W MY1 W Without spacer 0 to 6 6 to 12 12 to 18 0 to 11.5 11.5 to 23 23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 0 to 5.6 5.6 to 11.2 11.2 to 16.8 0 to 20 20 to 40 40 to 60 0 to 25 25 to 50 50 to 75

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

spring Pilot Diaphragm Repair Kit SUS304 9 11 KT-AR6 5 KT-AR8 5 KT-AR9 5 Dimensions Model A B C D E F Bracket Dimensions G H J NAR425435 3.15 5.55 1.46 2.64 3.01 0.12 1.83 1.89 3.15 (80) (141) (37) (67) (76.5) (3) (46.5) (48) (80) NAR625635 3.86 5.98 1.57 3.07 3.23 0.28 3.35 2.05 3.54 (98) (151.9) (40) (78) (82) (7) (85) (52) (90) NAR825835 4.96 8.54 2.95 4.33 3.86 0.20 (126) (216.9) (75