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. : No data is available. 13 - Revision history A : Fluid N2 Turbine oil class1 (ISO VG32) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights

This operation manual refers to all standard types and is partially applicable to special models. 0120-837-838 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

E: Added external shock absorber type variations. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

history No.LEC-OM01001 Jun/2009 1st printing No.LEC-OM01002 Apr/2010 Revision No.LEC-OM01003 Jun/2011 Revision Addition/Operation trouble Addition/Timing chart No.LEC-OM01004 Apr/2012 Revision Addition to notes about UL recognition No.LEC-OM01005 Jan/2014 Revision Addition/Troubleshooting No.LEC-OM01006 Jan/2015 Revision Addition/EMG signal Instructions 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ7000-OMR0001 Revision history 1st printing : SP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 48 Series LECP2 Dimensions Screw mounting (LEC2-) 38 36.2 85 4.5 For body mounting 18.1 1.2 4.5 110 101 86 4.5 For body mounting CN4 I/O connector CN3 Encoder connector CN2 Motor connector CN1 Power supply connector DIN rail mounting (LEC2D-) 38 36.2 85 (11.5) SL 24.2 35 127.3

SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) Absolute Controller LECP7-XB3 Series SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, 101-0021, JAPAN URL: http://www.smcworld.com Return to origin not required after power is OFF/Shorten equipment recovery time The current actuator position can be monitored even if the power of the battery is shutoff The position

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

SP158X-002E P: TS P.G.Information (Specialized Product) SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, TOKYO 101-0021, JAPAN URL: http://www.smcworld.com Liquid Dispense Pump (Solenoid type) Series LSP Features Compact solenoid type diaphragm pump, which dispenses fixed amount of liquid from 5L to 200L each time it is operated.

L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) U V V Connect to motor cable (U, V, W) Servo motor power (W) W W 101 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAPLC 2 m or less Note 5) FX3U-MT/ES (Manufactured by Mitsubishi Electric) S/S LECSA 24V 0V Note 4) Note 4) CN1 CN1 L Sequencer power

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved 09-E548 D-DN Vinyl Chloride Air Operated Valve Series LVP Piping from 4 directions are possible.

L1 L2 L3 L4 D1 D2 D3 22 LVW60-25A 32 60 70 81.5 14.5 172 LVW80-32A 72 90 94 20.5 205 38 26 LVW80-40A 83 90 20.5 220 48 31 101 LVW90-50A 120 26 275 60 100 39 136.5 LVW90-65A 120 279 75 135 44 138.5 26 LVW90-80A 304 89 158 140 51 143.5 33 OUT 853 LVW Series Applicable Fluids PVC Quick Drain Valve Material and Fluid Compatibility Check List Compatibility Chemical Material option N Note 2) Ammonium

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G

LZ B edition Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2007 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing GQ printing LZ 13500DN Printed in Japan.

S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical 10 12 Max. instantaneous power consumption [W] Note 9) 445 725 Type Note 10) Non-magnetizing lock Holding force [N] 101

counterbore depth 5.5 (Same on the opposite side) 3.4 through 2 x M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5 L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10 L (Hexagon socket head cap screw) 2 x M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2 x M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing VQ printing WQ 10270SZ Printed in Japan. D-G

the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031 11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101