PF3W7.eng

Rc(NPT)11/4 40 to 42 Nm Hysteresis H_1 Item Default setting / With the temperature sensor in parenthesis (Displayed alternately) Flow [L/min] Rc(NPT)11/2 48 to 50 Nm [F 3] Response time setting 1 second Temperature upper limit exceeded If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose.

PF3W5.eng

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) and other safety regulations. 4 Analogue output (flow rate) Rc(NPT)3/4 28 to 30 Nm Pin number of the connector at the body side Rc(NPT)1 36 to 38 Nm Maintenance Rc(NPT)11/4 40 to 42 Nm Element Description Rc(NPT)11/2 48 to 50 Nm How to reset the product after a power cut or when the

PF3W7x-X445.eng

[F80] Setting of power saving mode No setting [display is turned on] Rc(NPT)11/4 40 to 42 Nm Switch ON Switch OFF Do not touch the terminals and connectors while the power is on. Otherwise electric shock, malfunction or damage to the product can result.

XLDV Series

temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42

XMD/XYD Series

permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

MX-OMP0051

10 (MXQ6(B)) (MXQ8(A,B,C),12(A,B,C)) (MXQ8(A,B,C),12(A,B,C)) 11 (MXQ16(A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

Cylinder with lock

Lateral load is applied. 42 - 6. Maintenance 6-1. Construction Fig. 23 Construction No. Description Qty Note No.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Blinking 42 Press WRITE one time. Press LEFT 2 times to shift the blinking cursor. Press UP 3 times to set the value of 3. Press WRITE one time to enter into program STEP Blinking Blinking 4, which is the end of program 1. Press END to end the program setting for program 1. Program 1s programming ends. Set the program no. to 8 through UP to PRG 8.

CEx-OMQ0013

" " PRG 1 STEP 0 2 WRITE " End End0.0 2 LEFT PRG 1 STEP 1 " " UP 5 " " 5 UP PRG 1 STEP 1 " " 5 " " 1 WRITE 2 PRG 1 STEP 2 " " 3 LEFT " " UP 3 3 ) 41 PRG 1 STEP 2 " " " " 1 WRITE 3 PRG 1 STEP 3 " " 2 LEFT " " UP 3 PRG 1 STEP 3 " " " " 1 WRITE PRG 1 STEP 4 1 1 End " " " " " " 1 PRG 1 STEP 1 " " " PRG 1 STEP 1 UP No.8 " PRG "8" " " PRG 8 STEP 0 2 WRITE " End 42

CEx-OMG0106

Pause is effective less. (1) Timing between stopping till output is 0.2sec(max). 42 Emergency Stop (Automatic Execution) Timing Chart (Input) Homing SetHome Man'l / Auto Start Program Selection Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined Position Determined Program END Error Cylinder Movement Origin Note: When Emergency Stop is set to be ON, error will

Compact Rotary Actuator

Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180 42

Parallel Type Air Gripper

External gripping 11 34 42 65 158 254 force D I.D. Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.

MHx-OMU0057

General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

10 Max acceleration/deceleration [mm/s2] 5000 Positioning repeatability [mm] 0.01 (Lead H0.02) Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw(LEKFS), Ball screw + Belt(LEKFSR L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing speedmm/s*6 35 or less 30 or less 30 or less Positioning repeatabilitymm 0.02 Screw leadmm 6 8 8 Impact/Vibration resistancem/s2*7 50/20 Actuation type Ball screwBeltTop mounting, Ball screwIn-line Guide type Sliding bearing Operating temperature range 5 to 40 Operating humidity rangeRH 90 or less (No condensation) Motor size 42

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear guide (Circulating type) Operating temperature range[] 5 to 40 Operating humidity range[%RH] 90 or less (No condensation) Motor Size 28 42