SI unit (CC-Link compatible)

Resistance to ground should be 100 ohms or less. -15No.EX-OMP0005-I LED Indication and Settings LED indication LED LED Status Description Red ON Communication error The station number and baud rate settings have been changed during communication Red flashing L ERR OFF Communication is normal L RUN Green ON Communication is normal OFF Communication has terminated (time out error) PWR Green

SI unit for PROFIBUS DP

Resistance to ground should be 100 ohms or less. -16No.EX-OMN0009-G LED Indication and Settings LED indication LED Description SF System fault BF BUS fault PWR Turns ON in green when SI unit operating voltage is supplied Turns ON in green when load voltage for the valve is supplied.

SI unit for CC-Link

Resistance to ground should be 100 ohms or less. A. Single power supply used B. Dual power supplies used Fig. 6 -14No.EX-OMB0014-H Settings Display setting Display Meaning PW LED is ON when the communication power is ON Indicates whether the SI unit is communicating with the master station correctly. LED is ON when the SI unit is receiving normal data from the master station.

Vacuum regulator

-1.3kPa Withstand pressure Note2) 100 kPa(Except with pressure gauge) Knob resolution 0.13kPa or less Atmospheric intake consumption Note3) 0.6L/min(ANR) or less Ambient and fluid temperature 5 to 60 VAC side tubing O.D 68 6810 1/45/163/8 SET side tubing O.D 1/45/16 Standard connections 135g(IRV10-C08) 250g(IRV20-C10) Weight (No accessories) Single sided connections 125g(IRV10A-C08) 250g

Fieldbus system (CC-Link compliant)

Supply voltage for sensor 24 VDC Max. supply current for sensor 0.2 A/1 point, 0.9 A/1 unit Current consumption 100 mA or less (inside of Input unit) Input resistance 5.6 k Rated input current 4 mA or less 17 V or more/2.5 mA or more 17 V or more/2.5 mA or more ON voltage/ON current (Between input terminal and (Between input terminal and 0 V for sensor) +24 V for sensor) 7 V or less/1 mA

Fieldbus system (PROFIBUS DP compliant)

Network length Communication speed [kbps] 9.6 19.2 45.45 93.75 187.5 Max. cable length [m] 1200 1000 Communication speed [kbps] 500 1500 3000 6000 12000 Max. cable length [m] 400 200 100 : Maximum cable length differs depending on the specifications of a cable. The above cable length is based on type A cable.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Free flow Controlled flow Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258

MXU

AC DC Auto switch model Lead wire length (m) 0.5 (Nil) Load voltage Indicator light Wiring (Output) Special function Type Electrical entry Pre-wire connector Applicable load 3 (L) 5 (Z) Perpendicular In-line IC circuit 3-wire A96V A96 5 V Reed switch Solid state switch Grommet (NPN equivalent) Yes Yes 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV

Thomas Oil-less WOB-L Piston Compressor / Vacuum Pump Flow Rate: 2 CFM / 57 LPM , 2 CFM / 57 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Max Vacuum: 26.9 in HgV / -912 mbar , 26.9 in HgV / -912 mbar, RPM (60 Hz): 1371, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase Series Configured Datasheet.

Cylinder with Lock/Double Acting, Single Rod Series CLS

V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

10%, 50/60 Hz10 A5.5 A (100 VAC) to 2.5 A (240 VAC)Refer to alarm function.RS-232CApprox. 28.7 lbs (13 kg)Power cable, Foot for fixing, Splashproof coverCE marking, UL (NRTL) standards, SEMI

NGIP seies

PSI (7kgf/cm,) 150 PSI (9.gkglicm,) 40 140"F (5 -60"C) Nose mount, Flange mount, Foot mount, Clevis mount, Trunnion mount Series NCJP BrackeklPartNo.

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

NVEPA|VEFseies

The dither may generate vibrations in fe valve which produces a growling noise and may be ad.iusted within a range of 100 to 2m Hz by luming the DITHER adiustment screw.

MXU

AC DC Auto switch model Lead wire length (m) 0.5 (Nil) Load voltage Indicator light Wiring (Output) Special function Type Electrical entry Pre-wire connector Applicable load 3 (L) 5 (Z) Perpendicular In-line IC circuit 3-wire A96V A96 5 V Reed switch Solid state switch Grommet (NPN equivalent) Yes Yes 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV

H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

How to Order

AC (50/60 Hz) Bracket CE-compliant 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Nil : Without bracket F : With bracket 3 port For type W, only DC voltage is available. Note) CE-compliant: For DC only. Actuation type Bracket 1 2 Normally closed Normally open Bracket is mounted. Brackets cannot be retrofitted. External pilot type is not available.

10-SYJ3000

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

AP500

70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392. Fluid temperature [C] 382 A