Multistage Ejector (N)ZL Series

50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120

99

70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 2.22 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 8.96 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 2.22 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 8.91 lb

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA

Process Pump

D-DN

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Refer to pages 20 and 21 for the D-P3DW type.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

870 1580 1570 1680 1710 1840 D-X Individual -X 221

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

Internal circuit D-P3DW(A) AND connection is not possible for this product. D-P3DW(A)SC D-P3DW(A)SE -10No.D-#S-OML0002-B Maintenance How to reset the product for power loss or forcible de-energizing Regarding set up, contents of the program may be maintained by customer's application systems.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

MDHR3-10 1122MDHR3-15 1122H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. protrusion of auto switch from edge of body: L, H Max. protrusion of auto switch from edge of body: H (mm) (mm) D-M9 D-M9V D-M9V Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-M9. 2.3 H 939 Rotary Actuated Air

EX510-GPR1.eng

For single power supply use COM D COM D is receiving data: Lights up 2 COM D is having no data to receive: Goes off 1: Refer to "Operation Manual" for the extension diagnosis information. 2: It is lit when input unit is connected and communicating normally.

HRX-OM-W004

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Fieldbus system Analog unit

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Number of auto switches Bore size 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 2 pcs 1 pc n pcs Nil S n Stroke adjustment unit symbol Refer to Stroke adjustment unit on page 1351. Made to Order Specifications For details, refer to page 1351.

Precision Regulator Series IR1000/2000/3000

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30