VFS4000-OMY0001

1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

VFR2000-OMM0001

JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5

VFRA3000, 4000 Series

Ensure sufficient space for maintenance activities. fitting, etc. 1) M5 After tightening the fitting by hand, use a wrench to When installing the products, allow access for maintighten the fitting an additional approximately 1/6 to tenance. 3. Tighten threads with the proper tightening torque. 1/4 turn. As a reference value, tightening torque is 1 to 1.5 Nm.

5/32 inchSensor pressure receiving area: SiliconPBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR75 g79 g37 g

5/32 inchSensor pressure receiving area: SiliconPBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR75 g79 g37 g

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 20mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 75mm

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

Lubrication Non-lube +1 0 mm MXPJ6 5, 10 105 MXPJ6-10 Stroke length tolerance 194 Air Slide Table Series MXP Specifications MXP6 MXP10 10 MXP6 6 MXP8 8 MXP12 12 M5 x 0.8 M3 x 0.5 MXP16 16 Model Bore size (mm) Piping port size Fluid Air MXP8 Action Double acting Operating pressure 0.15 to 0.7 MPa 1.05 MPa Proof pressure MXH 10 to 60C Ambient and fluid temperature 50 to 500 mm/s (Adjuster option

Exhaust Cleaner for Clean Rooms AMP Series

screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32

Stainless Steel Regulator Series NSR

Fluoro rubber Cle6n ieguletd Fluoro rubber & Body size Fluorc resin 'l 10-32 UNF Construclion o-Non relieving (standard) 'l -Relieving {only applicable to Airor N2 gas) NoteiConsull factory ior applications ol othr tluids.

7mm Wide, Compact, Pilot Operated, 5 Port Solenoid Valve Series S0700

saving circuit) Sonic conductance 0.36[dm3/(sbar)] Weight 28g (A single solenoid unit) CV:0.1 4-position dual 3 port valve Manifold Single unit With power saving circuit Base mounted Plug-in manifold Plug connector Grommet 8.5mm pitch 7.5mm pitch Serire S0700 Cylinder speed Cylinder speed Average speed (mm/s) Vertical, upward operation 400 Horizontal operation 300 200 100 0 6 10 16 20 25 32

Air Cylinder RSQ Series Stopper Cylinder

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

Vacuum Ejector with Solid State Timer, Series ZMA

single line for suction signal (valve wiring is unnecessary) Timer can be easily adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 63mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 75mm, Auto Switch: G5BA, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 63mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 75mm

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 50mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 25mm

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 40mm, Thread: Rubber Bumper: Rc: 20 to 100; Air Cushion: M5: 20, 25; Rc: 32 to 100), Seal Material: R (NBR Seals, Nitrile Rubber), Stroke: 25mm

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 63mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 50mm, Auto Switch: G5BA, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 40mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 50mm

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 40mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 50mm, Auto Switch: G5BA, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Style: N (Rubber Bumper), Bore Size: 50mm, Thread: TN (Rubber Bumper: NPT 20 to 100; Air Cushion: M5: 20, 25; NPT: 32 to 100), Seal Material: V (FKM Seals, Fluororubber), Stroke: 25mm, Auto Switch: G5BA, Lead Wire or Prewired Connector: L (3m)