AC Servo Motor Driver (CC-Link Type ）

Perform a home position return as necessary. 5 8 5.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

O.D.: 6 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 6, 1/4" 8, 5/16" 10, 3/8" U side D side L3 (L4) L5 6.5 31.6 DIN rail holding screw (For DIN rail mounting) (5.3) (5.1) SI unit 68.5 10.1 9.5 B B B B B 8 128.8 115.8 A A A A A 83.8 5 35 COM PWR 5.5 A B A B 14.3 29.6 46.9 Manual override Press and turn

AC Servo Motor Driver (CC-Link Type ）

for group a. 14 8 14.

5 Port Solenoid Valve

L3 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" [External pilot] One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18

Table of Contents

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A B A B A B 12 4.5 5.5 5 6 2 3 16 7.5 5 8 5.5 5 2.5 20 7.5 6.5 8 7 5 4 25 7.5 7 8 7.5 5 4.5 32 9.0 6 9.5 6.5 6.5 3.5 8 5 12 9 11 8 40 13 8.5 9 13.5 4.5 9 10.5 6 12 7.5 16 11.5 15 10.5 50 11 11.5 7 11.5 7.5 12 8.5 9 10 10.5 14 14.5 13 13.5 63 13.5 14.5 9.5 14 10.5 15 11 12 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 13.5 18 14 18.5 15 15.5 16.5 17 20.5 21 19.5 20 100 21 24 17 21.5

Vacuum Pad

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

Vacuum Pad

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

Vacuum Pad

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

Vacuum Pad

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Valve 1/8 1/4 1/8 1/4 P, EA, EB port Rc 1/4 M5 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) SV P to A/B 15.84 (863.7) A/B to EA/EB 14.94 (814.6) P to A/B 9.18 (255.3) A/B to EA/EB 9.9 (539.8) P to A/B 3.6 (196.3) A/B to EA/EB 4.14 (225.7)

Series SV

N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] Rc 3/8 [1(P), 3(E) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 U side D side (L4) L3 L5 30.1 4-6.2 (for mounting) (5.4) 13.3 [with Rc 1/4, 3/8] DIN rail holding screw B B B B B 81.7 75 (for DIN rail mounting) 8 68.5 9.5 164.7 148.2 A A A A A 35 98.2 5.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A G NPT R1 port:

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 11 0 1 2 3 7 8 4 5 9 11 12 6 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

Table of Contents

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

Compact 5-Port Solenoid Valve

screw (For DIN rail mounting) Manual override (Non-locking) 4(A) port side: Blue 2(B) port side: Yellow Valve plate (Recommended tightening torque: 1.4 N.m) Power connector 36.7 Marker groove 0 1 9.5 (5.5) A A A A (91.7) 2 3 B B B B 78.5 66.5 106 90 4 A 4 A 4 A 4 A 0 1 47.3 (39.3) 4 5 PWR 2 3 (8) PCI BUS OUT BUS IN 53 B 2 B 2 B 2 B 2 FE terminal 8 7 (35) 4.6 5.3 2.2 (12.9) 5.4 (14.8) 8 4

ISO Cylinder

B A B A B A B 8 6.5 6.5 2 2 3 3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3

CQ2

B A B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10 10.5 14 14.5 13 13.5 63 13.5 14.5 14 15 11 12 18 19 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 18 18.5 15 15.5 22 22.5 16.5

VFR

exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0 1 0 1 0 1 0 1 [For Rc 3/4] Rc 1/8 External pilot port 3-2.3 2-7 (Mounting hole) Rc1/8 (PE port) 174.5 [176.5] 31 [41] 100 9 [20] 2 (Lead wire electrical entry) Manual override (Non-locking) A B [13] 11 2 48 60 72 [79] 12 COM A B PE A B X EA EB P [For Rc 3/8, 3/2] Rc 1/8 External pilot port 21 [31] 34 8 161.5 [165.5]

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Description Manifold block ass'y * : O-side ports A, B 1-1/8 P, A, B bottom 2-118 P, A, B bottom wi MBF261*-~-1 B Manifold block. ,Clamp 0, 8 . O-ring. ,.,",0 Plug-in type Adapter 8 , Pin housing. Guide. Insert plug lead wire Connector lead wires Manifold block G ,Clamp 0, 8 . O-ring 8 ,0, ., , 0 Plug-in type MBF261* -g~-1 A Adapter 8 . Terminal (l) . Pin housing. Guide.