MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

closed center / exhaust center / pressure center : SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 0.5 (Pilot port) 1.8 10 4 A B 1.5 8.2 7 19 (Mounting holes) 3.2 22-M3 0.5 (Pilot port) 22 3 49 2.5 (Mounting holes) 3.2 2A B 1.5 18.5 11 17.5 Manual override (Non-locking) A B 1.5 33 16 18.9 18.5 21 13.5 54.5 15 Manual override (Non-locking) 21.6 54.5 28.5 21 R2 P P1 1(Bleed port) 2P R 13 11 0.5 10 5

CLQ

11 Series CLQ Construction: 20 to 32 i o !

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

High performance type Step Motor Controller (Servo/24 VDC)

(The electric actuator starts the operation.) 9) AREA output is turned ON for the step data no.2 (at 170mm from the origin point). 10) AREA output is turned OFF for the step data no.2 (at 130mm from the origin point). 11) BUSY is turned OFF. (The electric actuator stops.) INP is turned ON. 53 No.JXC-OMY0002-A 11.

HRX-OM-M005

CH2 TEMP SP 4 3 6 3 2 1 Figure 5-11 Ten-key Screen Table 5-8 Ten-key Screen No.

Compact Cylinder with Air Cushion Series RQ

18 43.5 60 30 to 100 73 55 M FV 80 11 11 99 116 134 20 53.5 77 40 to 100 83.5 63.5 100 11 11 117 136 154 22 53.5 94 40 to 100 98 76 L FT B + Stroke A + Stroke FX FZ 4 x LD Flange bracket material: Carbon steel Surface treatment: Nickel plated Rod end male thread CUJ CU Rod end nut L1 CQS Head Side Flange Style mm Head side flange style: RQG/RDQG CQ2 Stroke range (mm) Bore size (mm) L1 L

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

mlu

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Servo Motor Controller (24 VDC)

(11)BUSY is turned OFF. (The actuator stops.) INP is turned ON. 43 - 11. Option 11.1 Actuator cable LE CA Cable length (L) signal Tarminal no. Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 17 10 14 15 3 5 27 11 12 6 9 14 12 1 4 11 9 27 2 4 19 15 8 18 41 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (18). Table (18) Parts where grease is to be applied 2. Mount the tube gasket 11 to the left cover 3 to mount to the body 1 .

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Red 4 Lock (+) B-1 order Black 5 Lock (-) A-1 Brown 1 Sensor (+) B-3 Blue 2 Sensor (-) A-3 Actuator side Controller side (b) (17.7) 6.7) 5.7) (10.2) (14.2) 5.5) (d) (a) A B 1 3 1 2 14) 1 4 5 6 (13.5) 1 3 2 1 18) 1 (c) 16 15 (e) (10.2) (11) (10) (14.7) (30.7) L 11 - (2) Incremental Encoder compatible [1] Actuator cable [5m or less] LE CP Signal name Terminal No. (1) (2) Cable color Terminal

S070

It can cause malfunction or break the coil. 4-11-19

S070

It can cause malfunction or break the coil. 4-11-19

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Air Cylinder

19.5 31.5 43.5 49.5 73.5 91.5 103.5 5 D-M9lV 10 11.5 11.5 19 31 43 4.5 CS2 16 11 11 19.5 31.5 43.5 49.5 73.5 91.5 103.5 5 D-A9l 10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 D-A9lV 10 7.5 7.5 15 27 39 0.5 16 7 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 Rail mounting D-F7l/F7lV D-J79/J79C D-A7lH/A80H D-A73C/A80C 10 10.5 10.5 18 30 42 3.5 16 10 10 18.5 30.5 42.5 48.5 72.5 90.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

CHKD/CHKG

9.5 11 12 14 16 20 Since this is a guideline including hysteresis, not meant to be guaranteed.